INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 224)

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STC-2000A DEPOSITION CONTROLLER
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Parameter 38 rate from sensor 1
access index: RATE1
Value Range 0 To 9999 [integer]
Units Deci-angstroms/sec
The rate reported from sensor 1 with 9999 representing 999.9 Å/S. 1 of 8 in a contiguous block. Associated
card needs to be physically installed and enabled before a reboot.
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Parameter 39
rate from sensor 2
access index: RATE2
Value Range 0 To 9999 [integer]
Units Deci-angstroms/sec
The rate reported from sensor 2 with 9999 representing 999.9 Å/S. 2 of 8 in a contiguous block. Associated
card needs to be physically installed and enabled before a reboot.
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Parameter 40
N.A.
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Parameter 41
N.A.
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Parameter 42
N.A.
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Parameter 43
N.A.
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Parameter 44
N.A.
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Parameter 45
N.A.
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Parameter 46
xtal life/status from sensor 1
access index: XLIFE1
Value Range 0 To 99
Units Percent
xtal life/status from sensor 1. This parameter along with the following seven parameters form a contiguous
block of 8. Associated card needs to be physically installed and enabled before a reboot.
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Parameter 47
xtal life/status from sensor 2
access index: XLIFE2
Value Range 0 To 99
Units Percent
xtal life/status from sensor 2. 2
nd in a contiguous block of 8. Associated card needs to be physically
installed and enabled before a reboot.
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Parameter 48
N.A.
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Parameter 49
N.A.
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SECTION 6.XX page 224 of 292