INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 246)

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STC-2000A DEPOSITION CONTROLLER
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19 QUALDEP Failed quality while in deposit
Table 6.13: Process Accounting Id List.
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Command Examples
Command L0
2
Response A1234
Description
Read the 0th (most recent of the four) process log item # 2, the run #. run # 1234 was the
run most recently completed.
Command
L 3 2
Response A ”BLANK” spelled out
Description Read the 3rd (oldest of the four) process log item # 2, the run #. The log has no
information in this entry, fewer than four processes have been logged into the history.
Command L0
14
Response A BADXTL
Description Read the 0th (most recent of the four) process log item # 14, the completion status of the
process. A bad crystal caused the stopping or aborting of the run.
Table 25.7: Group 8 Examples.
Read, Load I/O program
Read, Load I/O program Group 9 --
Commands M,N & O
(M) (N) (O) I/O Program Reading And Loading. These commands are used for uploading and
downloading the I/O rungs. These commands are not used for controlling the I/O program, just
getting it in and out of the STC-2000A.
M - read I/O rung
N - select I/O rung for change
O - I/O rung data
Load I/O Program (M, N, O)
These commands Read and Set I/O rung expression contents. Follow M with number n for which
rung is to be read (n can be 1,2 or 3 digits from 1 to 999). If the M command is followed immediately by =
, it means repeat the transmission of the same information. If it is followed immediately by + , it means
advance to the next portion of rung information. This is needed in order to keep the I/O buffers short. It is
possible for the rung length to exceed the STC-2000A buffer which is 13 bytes long. In this case it is
broken up into several lines of information.
If
n is beyond the last rung with contents, the STC-2000A will return end and the rung number of
the END rung as follows: "A.END nn".
The
N command is used to change a rung to new data. The N is followed with number n to
identify which rung to change. After the initial N command, subsequent 'O' commands specify the new
rung data.
The
O command sends an I/O expression to the STC-2000A. The O is followed immediately with
either a period ('.') or a sequence digit '0' .. '9' and the ASCII rung information. The entire string of the 'O',
the '.' or digit, and the following rung symbolic must not exceed 13 characters. Lines longer than this use
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