INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 279)

p
STC-2000A DEPOSITION CONTROLLER
y
Section 10.0
QUICK INDEX (continued from section 1.2)
All menu navigation begins with the Runtime screen displayed. Pressing the fixed STATUS key while
navigating the programming menus provides an exit from the menu system.
1. a) description: Process sequencing mode employs a user generated recipe of deposition layers where
each layer is a step in the recipe program. Each layer/step contains MODE type, FILM number and layer
final thickness. The MODES are SKIP, STOP, WAIT, AUTO and END. FILMs are user programmed for
each process step and identified by film number. Process non-sequencing mode has only 1 implicit process
layer/step. The film number is directly user entered by selecting the active film and the final thickness is a
user programmed parameter on the REVIEW FILM menu.
purpose: Select process sequencing or process non-sequencing mode. Generally speaking, to make single
layer deposits use the non-sequencing mode, to make multiple layer depositions use the Sequencing mode.
background/conceptual info: pages section 2.1, pages 24, 25, 26; section 2.2, page 40 [Programmable
hardware setup discussion].
detailed info: pages section 3.3, page 66
see index keyword
programming summary: Selecting between Process Sequencing and process Non-sequencing modes is
accomplished by: Fixed MENU key
⇒ SERVICE key → SEQ ABLE /(NON SEQ) → [ARM RESET]
→ ACCEPT. Unit will reset after ACCEPT key is pressed.
1. b) description: The TEST mode supplies simulated rate information which, in turn, simulates a crystal
sensor input while in any combination of sequencing mode, non-sequencing mode, auto or manual modes.
purpose: To run through a deposition process without a crystal sensor signal. Please note that the power
control outputs remain active when the TEST mode is enabled.
background/conceptual info: pages 24
detailed info: pages
see index keyword
programming summary: Selecting the TEST mode is accomplished by pressing: Fixed MENU key
⇒
SERVICE key
→ TEST OFF / (TEST ON) → [ARM RESET] → ACCEPT. Unit will reset after
ACCEPT key is pressed.
1. c) description: The MANUAL mode is used to manually alter the power level of the control outputs that
control the external power supply. Only the active control output is effected. The unit needs to be running a
deposition before manual mode can be invoked. Manual control is accomplished by means of the arrow
keys on the pendant or by the arrow keys on the 2
nd
STATUS screen. There are 2 analog outputs and they
reside on the 9 pin D-Sub connector on the back panel, which is labeled SOURCE.
purpose: Adjust control output voltage manually.
background/conceptual info: pages
detailed info: pages
see index keyword
programming summary: Fixed MANUAL key (while deposition [rise, soak, or deposit phases] is
running)
1. d1) description: The host port communications include an alternate means of programming the unit
other than by front panel keys, reading status information, reading runtime information, control of various
aspects of a deposition, downloading/uploading data in selected areas, etc.
purpose: Set up host port communications, user programmable settings
background/conceptual info: pages
detailed info: pages Section 6.3
see index keyword
programming summary: Fixed MENU key
⇒ EXECUTIVE MENU key → COMM. SETUP key →
RS232 BAUD RATE and/or RS232 PROTOCOL (EDIT/CHANGE).
SECTION 10.XX page 279 of 292