INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual
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STC-2000A
DEPOSITION CONTROLLER
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SECTION 1.XX
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SECTION 1.3
TABLE OF CONTENTS
TITLE PAGE................................................................................................................................................ 1
WARRANTY ................................................................................................................................................ 3
INTRODUCTION [1.XX] ............................................................................................................................ 4
S
ECTION
1.0 ................................................................................................................................................ 4
Unpacking Instructions........................................................................................................................... 4
S
ECTION
1.1 ................................................................................................................................................ 4
Description of Symbols Found in Manual .............................................................................................. 4
S
ECTION
1.2 ................................................................................................................................................ 5
Manual Description: Usage, Organization, Section Contents Summary ............................................... 5
Quick Index (initial table of keys)......................................................................................................... 6
S
ECTION
1.3
T
ABLE OF
C
ONTENTS
...................................................................................................... 7
S
ECTION
1.4 .............................................................................................................................................. 13
STC-Spare Parts (included w/ STC-2000A) ......................................................................................... 13
STC-Optional Parts .............................................................................................................................. 13
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ECTION
1.5 .............................................................................................................................................. 13
STC-Optional Crystal Sensor Parts...................................................................................................... 13
S
ECTION
1.6 .............................................................................................................................................. 14
Contact Information ............................................................................................................................. 14
S
ECTION
1.7 .............................................................................................................................................. 15
Product Specifications.......................................................................................................................... 15
S
ECTION
1.8 ............................................................................................................................................. 16
Programmable Parameter Lists........................................................................................................... 16
Programmable Parameter Dependency Lists ..................................................................................... 19
S
ECTION
1.9 .............................................................................................................................................. 21
Sensor Specifications............................................................................................................................ 21
SIMPLE QUICK GENERALIZED OVERVIEW [2.XX] ..................................................................... 23
S
ECTION
2.0 .............................................................................................................................................. 23
For What Is The STC-2000A Used? [The Problem, The Solution] ...................................................... 23
S
ECTION
2.1 .............................................................................................................................................. 24
How Is It Used? .................................................................................................................................... 24
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ECTION
2.2 .............................................................................................................................................. 28
How Does It Work? .............................................................................................................................. 28
Hardware Setup Discussion ................................................................................................................. 32
Sensor Head: Hardware Generalizations............................................................................................. 34
Power Supply Connection .................................................................................................................... 36
Strip Chart Recorder Connection......................................................................................................... 36
RS-232 Communications Connection ................................................................................................... 36
Grounding Stud .................................................................................................................................... 37
Input Card Options............................................................................................................................... 37
Installation/Removal Of Sensor Cards, Input Cards, Output Cards .................................................... 38
Pendant (hand controller) .................................................................................................................... 39
LCD Contrast/Bias ............................................................................................................................... 39
Graphical Display ................................................................................................................................ 40
Mounting .............................................................................................................................................. 40
System Hardware Connections............................................................................................................. 40
Programmable Hardware Setup Discussion ........................................................................................ 40
Select RunTime Mode: Sequencing/Non-Sequencing, Manual Mode, Test Mode............................................ 40
Memory Storage of Menu Parameters ............................................................................................................... 41
Films & Processes / Active, Non-Active ........................................................................................................... 41