INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 283)

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STC-2000A DEPOSITION CONTROLLER
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2. c) description: Power supply control describes the analog output from the 9 pin D-sub female labeled
source in the back panel of the unit. The analog output is connected to an external high current or high
voltage power supply that is used to generate the evaporant stream within the vacuum chamber.
purpose: Control the power used to generate the evaporant stream which becomes the deposition thickness.
background/conceptual info: pages
detailed info: pages
see index keyword
programming summary: Fixed MENU key
⇒ REVIEW SS MAP key →
SOURCE FULL POWER
SOURCE MAX POWER
SOURCE OUTput ChaNneL
Fixed MENU key
⇒ REVIEW FILMS key →
MAX POWER LIMIT
ABORT MAX POWER SWITCH
MAX POWER DWELL
Fixed MENU key
⇒ EXECUTIVE MENU key → SYSTEM CONFIG key → RECORDER OUTPUT
CHANNEL.
[Note: there is redundancy in these two parameters: SOURCE MAX POWER and MAX POWER LIMIT. The
lowest value of the two will be used to limit the power. The MAP parameter is intended to be a characterization of a
particular power supply whose max power limit may be predetermined. Along with other power supply related
parameters, a particular map may be conceptually tied to a specific power supply. This being done, the FILM parameter
can never exceed the maximum power limitation.]
2. c1) description: The electrical connections for the two sets of analog power output control lines are
found on a single 9 pin D-sub female connector. Each analog output set has a plus (+) and a minus (-)
output, an analog ground and a ground shield connection.
Control Signal 1 Pin
Control Signal 2 Pin
+ OUTPUT 9 + OUTPUT 2
-OUTPUT 4 -OUTPUT 6
analog GND
5 analog GND 1
shield shield shield shield
purpose: Connect the analog output control voltage[s].
background/conceptual info: pages
detailed info: pages 145
see index keyword
programming summary: n.a.
2. d) description: The analog power output control voltage can be adjusted manually (while in manual
mode). Further, a deposition must be running before the manual mode can be invoked. The adjustment can
be made in any of 3 ways: pendant arrow buttons, 2
nd STATUS screen arrow keys or by host port
command.
purpose: Adjust power level manually (in manual mode)
background/conceptual info: pages
detailed info: pages
see index keyword
programming summary:
2. e) description: INPUT card control encompasses both hardware and software configuration. Input cards
must be defined and enabled in software before they will be recognized by the system (I/O SLOT TYPE).
Each input card has 8 opto-isolated inputs that can be either isolated or not isolated, internally powered or
externally powered (individually or as a group of 8). The inputs are recognized by I/O programming and
can be used to trigger various entities or start a sequence of events. The standard factory unit configuration
has 1 input card in I/O slot 1. Up to 4 input cards can be installed (at the expense of OUTPUT cards that
use the same I/O slots).
SECTION 10.XX page 283 of 292