INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 87)

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STC-2000A DEPOSITION CONTROLLER
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There are programmable Film and Map parameters that are only viable for particular hardware
configurations. Unless the hardware that is needed to support the programmable parameters is physically
installed and configured appropriately (on the SYSTEM CONFIGURATION menu), the process will not
run and will display various error messages indicating the cause. The SYSTEM CONFIGURATION
menu is accessed through the EXECUTIVE menu which is located on the MAIN menu.
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Examples:
Repaired crystal channels (or channels failed by user programming) must be RE-VERIFY'd on the 3 rd
STATUS screen before they can be recognized as good again.
If the typical PROCess X: status message does not change when the START key is pressed, check for
"STOP: INValid XXX " message and check the OPT/INF menu, page 2 for cards not installed
that are enabled in software (MIA). AC Power must be recycled OFF
ON to re-sync.
If SRC is zero, this is an indication that a source analog output control voltage has been assigned to a
source sensor card that is not present, not working, etc. Remember that the Source/Sensor Card
connection and System Configuration parameter: I/O Slot X type are only evaluated on power up
or on reset. Check the OPTions/INFo menu, page 2 and 3 to see what is currently in effect. To
work correctly, the S/S x: line should end with OK. If it ends with EMPTY, the card is not
present or not communicating. If the line ends with INCOMPATable!, the software versions in at
least some of the various PCB cards is not compatible- check for field changed PCB cards. If the
line ends with MIA, that sensor card is configured but is not physically present. [See
OPTions/INFo menu]
SECTION 3.XX page 87 of 292