INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual
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STC-2000A DEPOSITION CONTROLLER
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Programming Process 1 - (Example)
Process Programming Example
If the STC-2000A is already interfaced to a system ( hardware configured and I/O programmed)
the following example covers the majority of what a user needs to know to program a multilayered process.
Defining the Process
For the example, we would like Process 1 to be 6 layers of two alternating materials (Films 1 & 3).
To show the use of independent end thicknesses we will specify the first film to be 200Å thick, with each
succeeding layer being 50Å thicker then the previous layer. Three entities have to be programmed to
implement this process, Film 1, Film 3 and Process 1. Maps invoked by the films must also be defined. The
order of programming is not important. For this example we will start by programming Process 1.
With the RunTime screen displayed, pushing the fixed MENU key brings up the MAIN MENU.
Press the REVIEW PROCESSES key to bring forth the process view/edit menus. Press the GO2 PR
O
C
ESS
key, press the 1 digit and accept the entry by pressing the ENT
ER
key. This activity will place the focus of
the review/edit on process 1. The first line of a process layer list, for the process # indicated, is shown on
the screen and is identified as Step 01 at the ">" cursor. The ">" cursor points to the line that can be
edited. The cursor can be moved by the GO2ST
E
P, (UP)
↑, and (DOWN)↓ keys.
[Note: pressing the GO2PRC
key at this point would allow you to select an alternative process# to be reviewed/edited. Pressing the fixed STATUS
key would return to the RunTime screen.]
If it is not already the case, program layer 1 (step 1) as shown in
Figure 3.18.
Figure- 3.17: Process Review Screen
Figure 3.17 depicts the initial programming of the product as it leaves the factory. If this is the current
product condition, then just read the following 2 steps and perform the 3
rd
. If Process# 1 has been
programmed in some other way and can be overwritten, perform the activities in steps 1 through 3. If END
is STEP 01, perform activities in items 2 and 3.
1. Using UP/DOWN arrow keys, move edit cursor to STEP 01. Press keys: edit (EDT), change (CHG) and
mode (MOD) then press the END key. This action will delete all lines except the STEP 01 line which now
represents the minimum list, that with the END as the single line list.
2. With the edit cursor on STEP 01, press the MODE key (if necessary press the edit (EDT) and change
(CHG) keys first) and then press the AUTO (AUT) key and the enter (ENT) key. On step 01, the END will
change to AUTO. This action inserts a new line and increments the END line to reflect its new list position.
As END assumes its new position, it is given a new consecutive step number (02). The Film# is, by
default, set to film 1. Whether the Film# is entered by default or user entered, the 01 Film# will associate
film program 1 with layer 1.The Thickness is, by default, set to zero.
3. With the edit cursor on STEP 01, press the thickness (THK) key to edit the THICKness_KA column. As
the menu keys change to allow numeric entry, the thickness edit line appears at the bottom of the screen
where the desired end thickness for the first layer is entered (200Å). Press digits as needed in the previously
described manner. Note number to decimal point relationship. When digits are correct press enter (ENT) on
the numeric entry menu to accept these digits. After entering the thickness value, the menu reverts to its
EDT/CHG menu. Film# and Mode could have been included in this edit sequence. Press BAK to return to
the edit menu.
1.) Beginning from the factory setting (see fig. 3.17), press the edit (EDT) key to bring forth the process
edit menu.
SECTION 3.XX
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