INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 277)

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STC-2000A DEPOSITION CONTROLLER
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Section 9.0 Glossary
If a term cannot be found here in the glossary, check the programmable parameter lists as these terms are
not repeated here. The index and table of contents can also be checked.
Crystal generally refers to the quartz crystal within a crystal sensor head used in a vacuum chamber whose
wired interaction with an oscillator circuit produces an output that is used as an input to an STC-
2000A sensor card. The STC-2000A also uses crystals in its own circuitry for microprocessor
support, time base/signal comparisons and real time calculations.
Film, in STC-2000A terminology, is defined as a list of user programmable deposition related parameters.
Typically, one material deposition is accomplished per film (describes specific: material,
mechanical setup, timing, etc.). The STC-2000A can store up to 50 films (referred to as a film
recipe library). A list of film implementations can be placed into a process. Each film
implementation is referred to as a layer (or step in the process). Process layers can use the same
film many times or use any combination of different films.
manual mode is a possible sub-mode of either non-sequencing mode or sequencing mode. As the name
implies, it is intended to provide a means for the manual control of power, that is, the control of
the source control voltage output from the source sensor card that, in turn, controls the evaporant
generating power supply.
Memory Module (or Memory Card) option allows saving or restoring all parameters, configurations, films,
processes, process accounting and I/O programs in both memory locations A and B to the memory
card. The memory card function needs a memory interface board installed in the unit. If there is a
high density 15 pin female D-sub on the back panel, the memory interface board is installed. The
memory card has a write protect switch (LED status: green indicates memory card is ready to
accept new data as well as be read, red indicates that the write protect is on and that no new data
can be written to the memory card but it can be read). See also Glossary WP (write protect).
Microbalance theory
Non-sequencing mode is one of two basic deposition process control modes that uses a menu
programmable process entity called a film. Non-sequencing mode does not have a process (or at
least anything named as such). Non-sequencing mode uses 1 implicit process that can run 1 film.
The non-sequencing mode is easiest to configure (user programs what will become an active film).
The sequencing mode is more complicated only by the additional programming of a process[es]
that calls out a film or films. Simply put, the sequencing / non-sequencing
mode difference is that
of having or not having a process. The STC-2000A retains the non-sequencing mode for historical
compatibility and for simple depositions.
OSC-100A oscillator
password is a numeric sequence of up to 4 digits used to limit access to various programming menus. It is
intended as a protection device against unauthorized reprogramming of the film, map, process and
system configuration parameters (controlled by System Configuration menu's Password Lock #
parameter) and key beep, RS-232 interface and I/O programming parameters (controlled by
Communication Setup menu's Com I/O Lock Code parameter). A zero value is a non-password.
Any password value other than zero is considered a password. Consult factory to undo forgotten
passwords.
process is a list of film implementations. Each film implementation is referred to as a layer (or step in the
process). Process layers can use the same film many times or use any combination of different
films.
sequencing mode is one of two basic deposition process control modes that uses a menu programmable
process entity called (not coincidentally) a process. Each step of a process invokes a film.
Soft key refers to the LCD overlay touch keys whose definition, at any point, is software dependent.
test mode is a possible sub-mode of either non-sequencing mode or sequencing mode. Test mode is
available from the SERVICE menu for simulated out of system experiments. Crystal sensor head
information is simulated (actually rate info is simulated for the film) allowing setup of various
parameters/programming elements without crystal failure halting the simulated process. The
power supply control voltage output is, however, active while in the test mode.
SECTION 9.XX page 277 of 292