INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 235)

p
STC-2000A DEPOSITION CONTROLLER
y
access: SA1_HEADSTATE Source Board-A chl1 head status of HSTAT_class
______________________________________________________________________
Parameter 52
access: SA2_HEADSTATE Source Board-A chl2 head status of HSTAT_class
______________________________________________________________________
Parameter 53
access: SB3_HEADSTATE Source Board-B chl3 head status of HSTAT_class
______________________________________________________________________
Parameter 54
access: SB4_HEADSTATE Source Board-B chl4 head status of HSTAT_class
______________________________________________________________________
Parameter 55
access: SC5_HEADSTATE Source Board-C chl5 head status of HSTAT_class
______________________________________________________________________
Parameter 56
access: SC6_HEADSTATE Source Board-C chl6 head status of HSTAT_class
______________________________________________________________________
Parameter 57
access: SD7_HEADSTATE Source Board-D chl7 head status of HSTAT_class
______________________________________________________________________
Parameter 58
access: SD8_HEADSTATE Source Board-D chl8 head status of HSTAT_class
______________________________________________________________________
Parameter 59
access: ACPROC Active process.
______________________________________________________________________
Parameter 60
access: ACTSRCMAP Active source bitmap.
______________________________________________________________________
Parameter 61
access: S4A_BRDSTS Board slot A S4 status
______________________________________________________________________
Parameter 62
access: S4B_BRDSTS Board slot B S4 status
______________________________________________________________________
Parameter 63
access: S4C_BRDSTS Board slot C S4 status
______________________________________________________________________
Parameter 64
access: S4D_BRDSTS Board slot D S4 status
______________________________________________________________________
Parameter 65
access: BOX_FATAL_MD Instrument is in fatal unrecoverable mode.
______________________________________________________________________
Parameter 66
access: LAUNCHFNO Launch Film number, accessible when Non-sequencing. Can be set to range
1..LastFilm value and is used to augment use of the event code STARTCPL which starts
whichever film value is stored in LAUNCHFNO.
______________________________________________________________________
Read, Status Information Command Examples
Command F6
Response A1
Description
Query The Status Parameter 6, Active Film #. Active Film # is 1.
SECTION 6.XX page 235 of 292