INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 162)

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STC-2000A DEPOSITION CONTROLLER
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ID Number Valid Functions - Type Class Description
0 To 7 I - B I/O Remote Inputs 1 Through 8 (slot 1)
8 To 15 All - B I/O Relay Outputs 1 Through 8 (slot 2)
16 To 23 I - B I/O Remote Inputs 1 Through 8 (slot 3)
24 To 31 All - B I/O Relay Outputs 1 Through 8 (slot 4)
32 To 39 All - B I/O Relay Outputs 1 Through 8 (slot 1) [see ID 0-7, slot 1]
40 To 47 I - B I/O Remote Inputs 1 Through 8 (slot 2)
48 To 55 All - B I/O Relay Outputs 1 Through 8 (slot 3)
56 To 63 I - B I/O Remote Inputs 1 Through 8 (slot 4)
64 To 67 All - B I/O leftmost=64, rightmost=67 front panel LED indicators
68 To 71 I - B I/O leftmost=68, rightmost=71 fixed front panel function keys
72 I - B Istate Manual Mode [true/false]
73 I - V Istate Stopped Mode - Power Up [0]
73 I - V Istate True If Not In Any Stopped Mode [1]
73 I - V Istate Stopped Mode - Crystal Bad [2]
73 I - V Istate Stopped Mode - Remote I/O [3]
73 I - V Istate Stopped Mode – Front Panel [4]
73 I - V Istate Stopped Mode – Max. Power Abort [5]
73 I - V Istate Stopped Mode – Hand Controller [6]
73 I - V Istate Stopped Mode – User Interface Presence Lost [7]
73 I - V Istate Stopped Mode – Measurement Comm. to SS Card Lost [8]
73 I - V Istate Stopped Mode – Communication to I/O Card Lost [9]
73 I - V Istate Stopped Mode – Bus Hold Integrity Error [10]
73 I - V Istate Stopped Mode – Rotator Time-out Failure [11, 12...19]
74 I - V Istate Film 1 Through 50 Active [# 1-50] (0 if non-sequencing mode)
75 I - V Istate Process 1 Through 9 Active [# 1-9]
76 I - V Istate Polling Current Layer Info (0-99)
77 I - B Istate Sequencer Running a Process = True / at Rest = False
78 I - M Istate True If Power = 0%. Bitmap 8 sources
79 I - M Istate True If Source Shutter Open During Deposit Phase
80 I - V Istate Phase – Power Up [0]
80 I - V Istate Phase – Stopped At Zero Power [1]
80 I - V Istate Phase – Begin Crystal Verify [2]
80 I - V Istate Phase – Rise 1 [3]
80 I - V Istate Phase – Soak 1 [4]
80 I - V Istate Phase – Rise 2 [5]
80 I - V Istate Phase – Soak 2 [6]
80 I - V Istate Phase – Soak Hold [7]
80 I - V Istate Phase – Shutter Delay [8]
80 I - V Istate Phase – Deposit [9]
80 I - V Istate Phase – Rate Ramp [10]
80 I - V Istate Phase – Deposit After Rate Ramp [11]
80 I - V Istate Phase – Time/Power Recovery Phase [12]
80 I - V Istate Phase – Idle Ramp [13]
80 I - V Istate Phase – Idle Power After Successful Deposit [14]
80 I - V Istate Phase – Idle From Time-Power Mode [15]
80 I - V Istate Phase – Manual Control [16]
80 I - V Istate Phase – Ready After Stop – Waiting For Start [17]
80 I - V Istate Phase – Indexing To Pocket [18]
80 I - V Istate Phase – Hold Film Before Rise/Soak [19]
81 I - M Istate XTAL Shutter State- All Sensor Shutters Closed [0]
81 I - M Istate XTAL Shutter State- Sensor #1 = Shutter Open [1]
81 I - M Istate XTAL Shutter State- Sensor #2 = Shutter Open [2]
81 I - M Istate N.A.
81 I - M Istate N.A.
81 I - M Istate N.A.
81 I - M Istate N.A.
81 I - M Istate N.A.
81 I - M Istate N.A.
81 I - M Istate XTAL Shutter State- All Sensor Shutters Open [255]
82 I - M Istate SRC Being Modified or Designated as Active
83 I - M Istate Xtal Used Map- Sensors Making Active Contribution
84 I - M Istate Xtal Standby Map- Sensors In Standby Mode
Function Index
I INPUT
O OUTPUT
T TRIP
A ARM
D DROP
S SET
C CLEAR
Type Values
B Boolean
V Scalar
M Bitmap
(combined bit
weights)
E Event
SECTION 5.XX page 162 of 292