INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual

Page 18

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STC-2000A DEPOSITION CONTROLLER

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Source Sensor Max Power Value 0.0% - 100.0%
Source Sensor Analog Output Chnl 1 – 2 Channel Selection
Master Tooling Value

10.0% - 400.0%

Minimum Start Xtal Channels

1 – 2 minimum channels

Minimum Backup Xtal Channels 0 – 1 minimum channels
Minumum Active Xtal Channels

1 – 2 minimum channels

(Xtal) Channel Drop Filter

NONE, BALANCE

[Mask dropped Xtal channel Failure]

averaging mode only

Indexer Synchronization Mode

NONE, DELAY, FEEDBACK

Indexer Synchronization Time

2 – 999 seconds

Channel 1 Start Mode

OFF, ACTIVE, STANDBY

Channel 1 Fail Action (Mode)

NONE, ABORT FILM

Channel 1 Backup List

X – XX (1 item list to 2 item list), [where X = 1 to 2 (in each position
w/o redundancies, list extends to 0-2 for a 1 item list)]

Channel 1 Tooling Value

10.0% - 400.0%

Channel 1 Weight

10.0% - 400.0%

Channel 2 Start Mode

OFF, ACTIVE, STANDBY

Channel 2 Fail Action (Mode)

NONE, ABORT FILM

Channel 2 Backup List

X – XX,

[X = 1 to 2 (in each position w/o redundancies)] see CH1

Channel 2 Tooling Value

10.0% - 400.0%

Channel 2 Weight

10.0% - 400.0%


I/O Function elements:

[Menu end point: I/O Setup

Menu path: Main/Executive menu/ I/O Setup]

I/O Relay Functions

user I/O program

(8 Form C Relays per card [4 slots available for I or O cards])

I/O Input Functions

user I/O program + PCB jumpers

(8 Inputs per card [4 slots for I or O cards])

I/O Setup

Memory: save/swap, Operate: run/stop

I/O Programming

Edit (Program): IN, NOT, AND, OR, XOR, POSitive, NEGative,
OUT, TRiP, SET, CLeaR, ARM, DRoP, (events/states/logical
operators), (softnodes) and (numeric elements).
Arithmetic operators/elements: KON# (to input constants), ADD,
SUB
tract, MULtiply, DIVide, MODulus, EQUals, GReaTer than,
LESs than, and SELect. Editing: backspace, left/right arrows (to move
cursor), delete, undo, insert/delete line.

(Front Panel LEDs [4 discrete])

I/O programming elements (see table x in section 5xx and Section 2.2)

(User Front Panel Keys [4])

I/O programming elements (see table x in section 5xx and Section 2.2)

Pendent Keys

(beyond specified Manual Mode use: I/O programming elements
[see table xxx in section 5xx ])


Service Menu values:

[Menu end point: Service

Menu path: Main/Service]

(Test Mode Select)

Test Off, Test On [Test Mode won't remain in effect if power is cycled)

(Seq/Non-seq Mode Select)

Seq(uencing Mode Select en)able, Non-seq(uencing Select enabled)

(Memory Contents)

as is (no modification), purged, factory (defaults) [see section x.2.2xx ],
Memory Module to Unit or Unit to Memory Module [see section 3.20]

(Reset)

Arm reset, reset armed [Provide a product reset when back panel power
switch is not accessible. Also, use to generate ACCEPT key if not
present (e.g. to end the Test mode when in the Test mode).]


[Prerequisite states that must be in effect for the following parameters to be fully functional]

SECTION 1.XX

page 18 of 292

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