INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 20)

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STC-2000A DEPOSITION CONTROLLER
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[NOTE
1
: press to invoke number entry submenu, sequence of 1 or 2 digits is entered or discarded]
Note
2
: [the Seq Able / Non Seq key shows the current mode upon entry into the
Service menu, changing the mode toggles key text and generates the Accept
key that in turn needs to be pressed to accept new mode described on the key
in text]
RunTime Screen parameter Dependency List:
(Crystal Quality Indicator Select) L/Q, Loop x, Qual xx Film Parameters
(Crystal Sample Select)
Film Parameter: (XTAL) Rate Sampling = Timed or Intelligent?
Running in deposit mode
(Crystal Select) System Config Parameter: Need Source/Sensor Card 1
Review Source Sensor Map Element Parameters:
Minimum Start Xtal Channels
Minumum Active Xtal Channels
Channel X Start Mode
(Process X) Main Menu Parameter: [Next Process] Digit
Fixed Front Panel START key: sequence from N/A to 1
Service Menu: SEQuence enABLE
[sequencing mode]
Layer X (layer = step) Review Processes X: EDIT: CHANGE, INSERT, DELETE Layers/steps
Service Menu: SEQuence enABLE
[sequencing mode]
FILM Review Processes X: EDIT: CHANGE, INSERT, DELETE films
[sequencing mode]
Review Film X:
[non-sequencing mode]
(Manual mode) Running Process + Pressing fixed front panel MANUAL key +
attached Pendent
MAP# Film Parameter: Review Source/Sensor Map Select
SRC x Review Source/Sensor Map Parameter: Source Analog Output Channel
Film Parameter: Source/Sensor Map Select (select the map that
contains the above selected Source Analog Output Channel)
NOTE: If SRC is zero, this is an indication that a source analog output control voltage
has been assigned to a source sensor card that is not present, not working, etc.
Remember that the Source/Sensor Card presence and System Configuration parameter:
I/O Slot X type are only evaluated on power up or on reset. Check the OPTions/INFo
menu, page 2 and 3 to see what is currently in effect. To work correctly, the S/S card
must be present and communicating correctly. If the line ends with INCOMPATable!, the
software versions in at least some of the various PCB cards is not compatible- check for
field changed PCB cards. If the line ends with MIA, that sensor card is configured but is
not present. [See OPTions/INFo menu]
RUN, PHASE automatic up/down timers. Function when process/film is started
(START key sequence). Effected by film parameters that control film
phases within the deposition cycle.
RUN x System Configuration Parameter: Run Number
TIME/Day of Week/DATE System Configuration Parameters: Clock Time, Clock Date
Graph Film Parameters: Plot Vert Scale Volts, Plot Horiz Scale H,
Data Plot Type
(process start) Carry out the following 2 key sequence up to 3 times.
Press the fixed front panel START key + 1 of 4 touch panel keys:
Break Wait, Next Layer, Restart Layer, Reset / Start Process
(see figure in end of section 3.0). Use the appropriate touch key for the
task at hand. If unsure, use Reset / Start Process key in all 3 sequences.
Please read and understand this manual before starting a live process.
(Test mode) [to enter] Service Menu: Test Off
⇒ Test On (text toggles) + Accept
(Test mode) [to exit] Service Menu: Arm Reset
⇒ Reset Armed (text toggles) + Accept
Password Dependencies:
(Communications values) Main Menu/ Executive Menu/ Communications Setup: Com/IO Lock
Code [non-zero value enables the password dependency and is itself the
password.]**
SECTION 1.XX page 20 of 292