Stc-2000a deposition controller – INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual

Page 164

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STC-2000A DEPOSITION CONTROLLER

y

115

I - V

Istate

Sensor Slot A Status: PCB that was initially OK, now fails [6]

116

I - V

Istate

N.A.

117

I - V

Istate

N.A.

118

I - V

Istate

N.A.

119

I - V

Istate

Source Channel 1 Sensor Head Status: Off, Not Needed [0]

119

I - V

Istate

Source Channel 1 Sensor Head Status: Active, Contributing [1]

119

I - V

Istate

Source Channel 1 Sensor Head Status: Dropped, OK Failed [2]

119

I - V

Istate

Source Channel 1 Sensor Head Status: Failed, no replacem't [3]

119

I - V

Istate

Source Channel 1 Sensor Head Status: Missing, Config Err [4]

119

I - V

Istate

Source Channel 1 Sensor Head Status: Standby, backup list [5]

119

I - V

Istate

Source Channel 1 Sensor Head Status: Switched, fail to bak [6]

120

I - V

Istate

Source Channel 2 Sensor Head Status: (see Channel 1)

121

I - V

Istate

N.A.

122

I - V

Istate

N.A.

123

I - V

Istate

N.A.

124

I - V

Istate

N.A.

125

I - V

Istate

N.A.

126

I - V

Istate

N.A.

127

I - M

Istate

Verify Memory: Invalid Section: Film Parameters Area [1]

127

I - M

Istate

Verify Memory: Invalid Section: I/O Programming Area [2]

127

I - M

Istate

Verify Memory: Invalid Section: Process Accounting Area [4]

127

I - M

Istate

Verify Memory: Invalid Section: Process Sequence Area [8]

127

I - M

Istate

Verify Memory: Invalid Section: Archive fail (to Mem Mod) [16]

127

I - M

Istate

Verify Memory: Invalid Section: Clone fail (to Dep Contrlr) [32]

127

I - M

Istate

Verify Memory: Invalid Section: Clone OK [64]

128

I - B

Istate

Needs Reboot or Service, fatal error

129-149

Available

150

IO - B

Ustate

Resets / Sets Soak Hold Mode

151

IO - B

Ustate

Sample Off / On When In Sample/Hold Mode

152

IO - B

Ustate

Film Hold Off / On (requires event trig leave)

153

IO - M

Ustate

Set Deposition Power to 'Zero' (Unconditional) [Off = 0, On = 1]

153

IO - M

Ustate

No Sources Overridden, Source is at System Power [0]

153

IO - M

Ustate

Source #1 Overridden to Zero Power [1]

153

IO - M

Ustate

Source #2 Overridden to Zero Power [2]

153

IO - M

Ustate

N.A.

153

IO - M

Ustate

N.A.

153

IO - M

Ustate

N.A.

153

IO - M

Ustate

N.A.

153

IO - M

Ustate

N.A.

153

IO - M

Ustate

N.A.

153

IO - M

Ustate

All Sources Overridden To Zero Power [255]

154

IO - B

Ustate

M

easured rate not = desired Rate. (>=), set true when Rate > desired, user clr

155

IO - B

Ustate

Check if Zeroing is allowed on entering deposit (T = Skip)

156

IO - V

Ustate

I/O scalar analog out (0-255) times multiplier changes output

157

IO - V

Ustate

Launch Film number ___

158-169

Available

170-199

IT

Event

Computer Events 00 To 29

200 IT Event

Stop

201

IT / All

Evnt/Stat

Non-Seq Mode = Proc Start Event Req./ Seq Mode = Soft Node

202

IT / All

Evnt/Stat

Non-Seq Mode = Generic I/O Start / Seq Mode = Soft Node

203 IT Event

Switch

to Process 1 and Start it [non-seq mode = to Film]

204 IT Event

Switch

to Process 2 and Start it [non-seq mode = to Film]

205 IT Event

Switch

to Process 3 and Start it [non-seq mode = to Film]

206 IT Event

Switch

to Process 4 and Start it [non-seq mode = to Film]

207 IT Event

Switch

to Process 5 and Start it [non-seq mode = to Film]

208 IT Event

Switch

to Process 6 and Start it [non-seq mode = to Film]

209 IT Event

Switch

to Process 7 and Start it [non-seq mode = to Film]

210 IT Event

Switch

to Process 8 and Start it [non-seq mode = to Film]

211 IT Event

Switch

to Process 9 and Start it [non-seq mode = to Film]

212

IT

Event

Break Process Wait

213 IT Event

Restart

Film

214

IT

Event

Start Next Layer

215

IT

Event

Process Reset / Start

216

IT

Event

Seq Mode: Unconditional Process Start by I/O or Host Comp.

ID number | Valid Functions – Type | Class | Description

SECTION 5.XX

page 164 of 292

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