INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 259)

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STC-2000A DEPOSITION CONTROLLER
y
89, the inserted step is placed at the previous last step plus one. For example, if prior to the X1, 89=1
command above the last step was 3, then a new step 4 was created.
Command Y1
13
Response A1
Description
Command to query step 13 of process 1 is successful. The 1 value indicates the step is
occupied and is an AUTO step.
Command Z1
13=2
Response A
Description
Command to reprogram step 13 of process 1 is successful. The new mode of the step is
WAIT.
Command a9
3
Response A4
Description
Command to query step 3 of process 9 is successful. The numeric return of 4 indicates
film 4 is the active film for step 3 of process 9.
Command b4,5=6
Response A4
Description
Command to set step 5 of process 4 to film #6 is successful.
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Measurement Substitution Group
Measurement Substitution Group Group 14 –
Commands e,f,g
These commands substitute or over-ride measurement modes.
(e) - Over-rides thickness measurement.
(f) - Substitutes measurement mode.
(g) - Substitutes rate measurement mode.
Measurement Substitution Group(e,f,g)
The
‘e’ command either queries (if parameter is ?) or sets the measurement override system. A
setting of 0 disables the override and allows the system to make measurements from the crystal sensor. A
value of 1 selects thickness override and the STC-2000A uses thickness values provided via the
communications link using the (‘f’) command below. A value of 2 selects rate override mode, where the
‘f’ command updates rate information, and this rate is integrated to produce thickness update within the
instrument. A value of 3 selects dual override, where both datum are substituted, with the thickness value
sent with the ‘f’ command, and the rate encoded with the ‘g’ command.
The
‘f’ command sends a numeric value which has meaning when the instrument is set in a
thickness override (1,3) or rate override (2) mode. If instrument is in 0 mod, then the value is ignored.
Values from -9999999 to 9999999 allowed. Tenth Angstrom or hundredths A
°/sec units.
The ‘g’ command sends a numeric value which has meaning when the instrument is set in dual
rate/thickness override (3) mode. If the instrument is in modes 0,1,2 then the value is ignored. Values
from -999999 to 9999999 hundredths A
°/sec allowed
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SECTION 6.XX page 259 of 292