INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 9)

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STC-2000A DEPOSITION CONTROLLER
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SECTION 1.XX e page 9 of 292 ^
System Configuration ......................................................................................................................... 109
S ECTION 3.15 .......................................................................................................................................... 110
Detailed System Configuration Related Parameters .......................................................................... 110
S ECTION 3.16 .......................................................................................................................................... 112
Communications Configuration Related Parameters......................................................................... 112
Detailed Communications Configuration Related Parameters......................................................................... 113
S ECTION 3.17 .......................................................................................................................................... 115
STC-2000A Crystal Failure Processing ............................................................................................. 115
S ECTION 3.18 .......................................................................................................................................... 119
Process Accounting ............................................................................................................................ 119
S ECTION 3.19 .......................................................................................................................................... 121
OPTions/INFo .................................................................................................................................... 121
Checksum Validation ........................................................................................................................ 122
Checksums And Parameters After Purge............................................................................................ 123
S ECTION 3.20 .......................................................................................................................................... 125
Memory Module Programming & Usage ........................................................................................... 125
Memory Module Data Transfer ....................................................................................................................... 127
Memory Module Placement............................................................................................................................. 128
S ECTION 3.21 .......................................................................................................................................... 129
Programming Example....................................................................................................................... 129
Entering The TEST Mode................................................................................................................................ 129
S ECTION 3.22 .......................................................................................................................................... 137
Product Programming Summary........................................................................................................ 137
ELECTRICAL CONNECTIONS AND DESCRIPTIONS [4.XX] ..................................................... 142
S ECTION 4.0 ............................................................................................................................................ 142
Sensor Head Installation .................................................................................................................... 142
S ECTION 4.1 ............................................................................................................................................ 145
Electrical Connections And Descriptions........................................................................................... 145
S ECTION 4.2 ............................................................................................................................................ 145
Line Power ......................................................................................................................................... 145
S ECTION 4.3 ............................................................................................................................................ 145
Rack Mounting.................................................................................................................................... 145
S ECTION 4.4 ............................................................................................................................................ 146
Vacuum System Grounding ................................................................................................................ 146
S ECTION 4.5 ............................................................................................................................................ 147
Sensor Connections ............................................................................................................................ 147
S ECTION 4.6 ............................................................................................................................................ 147
Analog Control Voltage Connections ................................................................................................. 147
Control Voltage Output Connection ................................................................................................... 147
S ECTION 4.7 ............................................................................................................................................ 148
Analog Recorder Output Connection ................................................................................................. 148
Analog Recorder Output Specifications ............................................................................................. 148
S ECTION 4.8 ............................................................................................................................................ 150
I/O Interface ....................................................................................................................................... 150
S ECTION 4.9 ............................................................................................................................................ 153
Relay Outputs (Factory I/O Program) ............................................................................................... 153
S ECTION 4.10 .......................................................................................................................................... 154
Remote Inputs (Factory I/O Program) ............................................................................................... 154
S ECTION 4.11 .......................................................................................................................................... 154
RS-232 Serial Communications Interface........................................................................................... 154
S ECTION 4.12 .......................................................................................................................................... 155
Communications Options ................................................................................................................... 155
I/O PROGRAMMING [5.XX]................................................................................................................ 156
S ECTION 5.1 ............................................................................................................................................ 156