INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 264)

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STC-2000A DEPOSITION CONTROLLER
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13 MINSC Minimum Starting Contributors, 1 or 2.
14
MINRB Minimum Remaining Backups for good start, 0..1 .
15
PLTUN Platoon strength, min. # of contrib channels 1..2.
16 SFAILM Sensor failure mask, how to recover when averaging mode has a sensor
channel failure (FMSK_class)
0 FMSK_NONE No channel-failure rate-glitch correction.
Whatever happens with missing contributor occurs.
1 FMSK_FULL_MASK Full substitute via aggreg. multi-plier for rate
glitch continuously.
17
RSYN Rotator synchronization type, none, delayed, feedback
18
RSYNTM Rotator synchronization time 2..999 secs.
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Table of SnsChnlAtrb_class CPARM# values as third parameter
when second parameter for CHNL# channel 1-2.
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CPARM# Label
Description
1
SSMOD Starting Mode: of SMOD_class 1..3
0 SMOD_OFF channel not active
1 SMOD_ACTIVE channel active at start
2 SMOD_STANDBY channel needed as backup
2 SFOP Sensor Fail Operation of SFMOD_class 1..2
0 SFMOD_NOTHING no special failure operation
1 SFMOD_FILM_FAIL film failure signalled.
3 SBAKS Sensor Backup list, ordered list of channel numbers
which is saved as long integer form of decimal
list of 8 digits, from 00 (0) to 22.
Any form not exceeding the digit 2 and mathematically
between 0..22 can be conceptually entered,
but data entry process will compress the information
into minimum form by removing redundant
(subsequent) numbers.
4 STOOL Sensor Tooling factor 10.0 to 400.0 percent.
5 SWGHT Sensor averaging weighting factor. 10.0 to 400.0.
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SECTION 6.XX page 264 of 292