Stc-2000a, Deposition controller – INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual
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STC-2000A
DEPOSITION CONTROLLER
y
SECTION 1.XX
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Menu Parameter Dependencies.......................................................................................................................... 41
Tooling: Material Density & Z-Factor............................................................................................................... 41
Power Related Menu Parameters ....................................................................................................................... 42
Power Related Menu Parameter Dependencies ................................................................................................. 43
Initial Programming Setups (menu parameters) .................................................................................. 44
Menu Parameter Values & Programming After Memory Purge ........................................................................ 44
Menu Parameter Values & Programming After Factory Restored Memory ...................................................... 45
I/O Programming Introduction ............................................................................................................ 46
Boolean Logic Discussion ................................................................................................................................. 47
Simple I/O Program Examples .......................................................................................................................... 48
How To Develop I/O Programs............................................................................................................ 51
MENU PROGRAMMING AND OPERATION DETAILS [3.XX] ...................................................... 53
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3.0 .............................................................................................................................................. 53
LCD Touch Panel Overlay ................................................................................................................... 53
Front Panel Definitions ........................................................................................................................ 54
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3.1 .............................................................................................................................................. 62
Navigating Through STC-2000A Menus .............................................................................................. 62
Menu Tree............................................................................................................................................. 63
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3.2 .............................................................................................................................................. 64
RunTime Screen Description ................................................................................................................ 64
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3.3 .............................................................................................................................................. 66
Main Menu Description........................................................................................................................ 66
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3.4 .............................................................................................................................................. 69
Films And Processes............................................................................................................................. 69
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3.5 .............................................................................................................................................. 69
Film Edit/Review Mode ........................................................................................................................ 69
Film Parameter Checksum................................................................................................................................. 73
Film Parameter Lock Code ................................................................................................................................ 73
Film Parameter: Source Sensor Map Select....................................................................................................... 74
Review SS MAP ................................................................................................................................................ 74
Selecting the Active Film in Non-Sequencing Mode......................................................................................... 75
Detailed Film Parameter Descriptions ................................................................................................ 76
Detailed Map Parameter Descriptions................................................................................................. 84
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3.6 ............................................................................................................................................. 88
Editing Processes................................................................................................................................. 88
Process Lock Code ............................................................................................................................................ 98
Factory Restoration vs. Purged Settings ............................................................................................................ 98
Changing Memory Settings ............................................................................................................................... 98
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3.7 .............................................................................................................................................. 98
Set Active Process................................................................................................................................. 98
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3.8 .............................................................................................................................................. 99
Non-Sequencing Differences ................................................................................................................ 99
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3.9 ............................................................................................................................................ 102
Software Controlled RunTime Screen Keys........................................................................................ 102
L/Q key (Crystal Quality) ................................................................................................................................ 102
SMPL key (Sample and Hold)......................................................................................................................... 102
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3.10 .......................................................................................................................................... 103
Manual Power Control....................................................................................................................... 103
Using Pendent.................................................................................................................................................. 103
Using LCD keys .............................................................................................................................................. 105
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3.11 .......................................................................................................................................... 106
STC-2000A Shutter Delay .................................................................................................................. 106
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3.12 .......................................................................................................................................... 106
Deposition Source Control Loop Description .................................................................................... 106
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3.13 .......................................................................................................................................... 108
Film Phases And Parameter Groups.................................................................................................. 108
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3.14 .......................................................................................................................................... 109