INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 213)

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STC-2000A DEPOSITION CONTROLLER
y
access: CLQU control loop quality limit
Value Range 0 - 9
Units None
This parameter is used to set a threshold on acceptable control loop quality. When the
threshold is exceeded a sensor fail condition is assumed and the system will process this
condition as configured. A programmed value of 0 disables this test. A value of one
gives the tightest limits (5%).
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Parameter 39 Xtal Stability
access: XLQU crystal oscillation quality limit
Value Range 0 - 9
Units None
This parameter is used to set a threshold on acceptable sensing crystal performance.
When the threshold is exceeded a sensor fail condition is assumed and the system will
process this condition as configured. A programmed value of 0 disables this test. A value
of one gives the tightest limits.
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Parameter 40 Xtal Life Bounds
access: LIFB life bounds for I/O event
Value Range 0.0 - 100.0
Units Percent
This parameter is used to provide a setpoint on the allowable sensing crystal usage. This
setpoint may be utilized through the I/O system as a warning or interlock that sensing
crystals need attention.
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Parameter 41 Plot Vertical Scale
access: VSCL vertical scale units, 1..5..10..etc.
Value Range 0-4
Units 1,5,10,50,100 Å/s Or % Power As Selected
This parameter sets the vertical scale factor of the graphics display on the RunTime
screen.
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Parameter 42 Plot Horizontal Scale
access: HSPL horizontal sampling, 1,2,3.. samples per point
Value Range 1-600
Units Samples Per Display Point
This parameter sets the horizontal sweep rate of the graphics display on the RunTime
screen. Samples are taken at a rate of 4 per second. A programmed value of 1 will display
every sample. The x-axis is 200 samples wide on the RunTime display.
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Parameter 43 Data Plot Type
access: IPLT initial plot variable, chosen at start time
Value Range 0-2
Units 0 is Rate, 1 is Rate Deviation, 2 is Power
This parameter selects the type of information to be displayed on the RunTime graphics
screen.
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Parameter 44 Source Sensor MAP SELECT
access: SMAP Source/Sensor map associated, 1..30
Value Range 1 - 30
SECTION 6.XX page 213 of 292