INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual

Page 72

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STC-2000A DEPOSITION CONTROLLER

y



These 3 parameters
are dependent on
the RATE RAMP
MODE parameter.


System Related Parameters

The number of film parameters displayed will not vary but the number of accessible elements may

vary with the way the STC-2000A is configured [e.g. SEQ / NON-SEQ mode differences]. The STC-
2000A determines that if it is configured for certain types of hardware ( example) there are parameters that
do not make any sense. The STC-2000A provides conflict information and only allows running with
correct parameters depending on its configuration.

General description
To reiterate, there are 42 programmable parameters. There may be less parameters available at times due to
parameter mode choices which preclude the availability of other related dependent parameters. The fixed
MENU key is pressed to show the MAIN MENU. The REVIEW FILM key is pressed to enter the
Review(/Edit) Films menu. Different films can be viewed/edited by pressing the GO2 FLM (go to film)
key. In Sequencing mode, the active film is set by the film value on the programmed lines (steps) of a
process program. In non-sequencing mode, the active film is set by pressing the NEXT FILM key on the
main menu (this invokes a numeric entry screen through whose use the film is specified).

The first line of the Review(/Edit) Films menu shows the menu path to the current menu in

hierarchical form. On the same line, the film now being viewed is named after the text "EDIT". Likewise,
the film that is now active is named after the text "ACTIVE". The first parameter on the list will appear
first (density) as this is a factory default setting. Thereafter, the last viewed parameter on which the cursor
is left when exiting the menu, returns with the same cursor placement along with its adjacent list
parameters as the point of interest when returning to the list.
If the fixed STATUS key were pressed to leave the REVIEW FILM menu while individual parameters
were being scrolled, a return to the REVIEW FILM menu would return the parameter list not the individual
parameter view.
The following shows the result of entering a number (123.456) into the temporary workspace. This was
accomplished by pressing "1", "2", "3", "4", "5" and then "6". If a mistake were made, the sequence could
begin again at any point in the sequence.

Digits move from right to left as they are entered (decimal point is stationary).


After the complete desired number is entered, pressing ENTer will transfer the value from the temporary
workspace
to the saved parameter list value. Range boundaries will be enforced by software when not
already enforced by available digits.
Pressing the BAK or CLR keys will result in the abandonment of any values entered in the current
temporary workspace. Clear maintains the screen and resets the workspace to zeroes. BAK returns the
parameter list screen.

SECTION 3.XX

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