INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 265)

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STC-2000A DEPOSITION CONTROLLER
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SECTION 6.XX page 265 of 292
Returns: Error codes typical to format or range failure if format is incorrect. Returns [RZCD_AOK]
followed by parameter's value as stored in system ( enumerations start w/0 values, numbers having numeric
meanings stored naturally except floating point values are stored as integer values with implied decimal
points of fixed precision ). For example, m2,2,4 will query SS Map # 2, Crystal/Sensor channel 2, tooling
value from 10.0 to 400.0 percent for internal storage value of 100 to 4000 .
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Command: n
Mnemonic: EXCT_SSMAP_UPD
Parameters:
either <SSMAP#>,<SPARM#9..N>=<QQ> or
<SSMAP#>,<CHNL#1..2>,<CPARM#1..N>=<QQ>
Description: Command to set/program the multichannel Source/Sensor map parameters used to
configure the measurement process applied to a film. SSMAP# is an integer, 1..10, identifying which map
is being programmed. The second parameter, when in the range of 1..2, indicates a sensor channel (crystal
head) configuration is targeted, with the third parameter CPARM# ranging from 1..N (see table of
SnsChnlAtrb_class SCA_xxx_G values in 'm' command above). The second parameter, when in the range
of 10..N, will associate with the sensor map SPID_OUTFS (FIRST_GENERIC_SENSOR_MAP_P) thru
LAST_GENERIC_SENSOR_MAP_P (SPID_SFAILM) value per the SPARM# table above ( see 'm'
command above).
Returns:
[RZCD_AOK] (A or B) if correctly processed.
[RZCD_ILDV] if improper value for parameter argument.
[RZCD_ILSN] if too many arguments, wrong delimiters, etc..
[RZCD_INHB] if chosen parameter can not be programmed at this time. This currently does not
apply to any sensor map parameters, but could change in future, as needed.
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Command: ]
Mnemonic: EXCT_echochek
Parameters:
Any and all
Description: Special test code to implement test software, will echo back complete string content
identical to what was sent in. That is, sending ]HELLO returns the result of [RZCD_AOK]]HELLO where
[RZCD_AOK] is either an A or B.
Returns:
[RZCD_AOK]]xxxxx where xxxx is whatever was sent in to the parser following the ] character.