INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 64)

p
STC-2000A DEPOSITION CONTROLLER
y
SECTION 3.2 RunTime Screen
SEE SECTION 2.21 for proper initialization sequence.
When the instrument powers up and has fully initialized, you are presented with the RunTime
Screen. When this display is present, you can start, stop, and view the operation of the STC-2000A.
Figures 9.1 and 10.6, show typical RunTime Screens. While the RunTime screen is displayed, the 1
st , 2 nd
and 3 rd press of the STATUS key will bring forth 3 screens showing a version of the Runtime screen with
running paramters in large text, and 2 screens showing detailed sensor channel information and live keys.
Note
→ The fixed STOP Key is active on any screen.
There are several areas of interest on the RunTime screen.
RunTime Display Description
Area
# 1: Rate, Power and Thickness
1. Rate, Power, and Thickness Values. These are the current values of the three most important
process data and their units. These values are displayed on the LCD display
consecutively in text (touch indicated area) or graphically (menu change) and
simultaneously on the first STATUS screen in large format. They are also shown on the
first line of the main menu screen. When max power is reached: the text PWR% will
alternate with [MAX!] (on MAIN menu) and on other various LCD displayed screens.
Area # 2: Current Phase
2. Current Phase. This tells you what phase or stage of your process that you are currently in.
After you power up the STC-2000A or you return from a power loss, it is in a STOPPED
RESET state. Other main states are MANUAL, plus all of the phases associated with
source conditioning and DEPOSITION.
Area # 3: Data Area
3. Data Area. This shows a real-time view of your deposition process (an X/Y graph). Both the
vertical and horizontal scale of this display area can be changed to make this display the
most meaningful for your process. The data shown in this area during the DEPOSIT
phase can be one of three types; rate deviation, rate, or power. The data type and scale are
programmable as film parameters. This area is overwritten by the START menu options
when the fixed start key is pressed (shown below).
Figure- 3.5: RunTime Screen
1
2
3
4
5
1
SECTION 3.XX page 64 of 292