INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual

Page 227

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STC-2000A DEPOSITION CONTROLLER

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Parameter 1

Soak Hold Status

Value Range

0,1

Units False/True
This parameter indicates if a soak hold state is requested. A value of 1 returned indicates that it is
requested. A setting of true means that the soak 2 phase will be held overtime and prevented from entering
the deposit phase until the soak-hold is released (made false). This status and others are alterable via G
and/or I/O logic.
access: SKHLD soak hold status control variable, false(0)/true(1) status. program will stop at SOAK
HOLD state prior to deposition if this status was true(1). Requires an event trigger to break out of film hold
(RLSSKHLD event).

0 SKHLD_FALSE

1 SKHLD_TRUE

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Parameter 2

Forced Sample

Value Range

0,1

Units

Off / On

This parameter indicates if a forced sample state is in progress. A value of 1 returned indicates that a
forced sample condition is desired. This state can be changed from the computer interface (G2), I/O logic,
or front panel (hold/release ‘8’ key) when on RunTime screen.
access: FORSPL forced sample, false(0)/true(1) status.

0 FORSPL_off

1 FORSPL_on

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Parameter 3

Manual Controller Status

Value Range

0 To 3

Units None
This parameter indicates the last status of the manual hand controller according to the following values:
0 At

Rest

1

Both Up And Down (zero power without aborting)

2 Up
3 Down
These are for simulating the hand controller through the computer interface only. This parameter does not
reflect the physical status of the hand controller.
access: MCTL manual controller status, 0..3 for at rest, Both, Up, Down.

0 MCTL_ATRST

1 MCTL_ZERO

2 MCTL_UP

3 MCTL_DWN

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Parameter 4

Manual Mode Active

Value Range

0,1

Units False/True
This parameter indicates if the STC-2000A is in the manual mode. A returned value of 1 indicates that it is
in manual. This is a read only parameter, not available for G command.
access: MANL system in manual mode false(0)/true(1).

0 MANL_FALSE

1 MANL_TRUE

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Parameter 5

Stopped Mode

Value Range

0 To 6

Units None

SECTION 6.XX

page 227 of 292

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