INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual

Page 58

Advertising
background image

p

STC-2000A DEPOSITION CONTROLLER

y

Starting with 3 crystal sensors mounted in a chamber, each having external electrical connections

and oscillators in place, one crystal sensor is connected to sensor channel 1, and one crystal sensor is
connected to sensor channel 2. If channel 2 is programmed as its backup, automatic switching to the second
crystal sensor on the second channel is accomplished when the crystal sensor on channel 1 is force failed.
Replacing the broken/loaded crystal on the first channel (with the 3

rd

unconnected crystal sensor) and re-

verifying allows the first channel to be used again. This example, meant as glimpse into some possibilities,
presents only the effected topics here but there are other elements such as shutters, thickness values, etc. to
be considered.

An example of a force fail selection appearing to the right (3

rd

STATUS screen).


An example of a zero thick selection appearing to the right. Next, re-verify BAD crystal.

An example of the 2

nd

STATUS screen during a deposition when not in manual mode. Note the absence of

arrow keys (not in manual mode).

An example of the 3

rd

STATUS screen during a deposition when not in manual mode.

SECTION 3.XX

page 58 of 292

Advertising