INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 188)

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STC-2000A DEPOSITION CONTROLLER
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Input 1 Start Process Film – In sequencing mode, functionally identical to the fixed Front Panel START
key followed by the RESET/START PROC key with the STC-2000A in the process stop state.
Activating this input with the STC-2000A in any state except busy and wait will begin the active
process. In non-sequencing mode, starts current active film unconditionally.
Input 2 Stop -Functionally identical to fixed Front Panel STOP key. Activating this input will terminate
the deposition process. Displays STOP: REMOTE in the Runtime status area on the LCD screen.
Input 3 Final Thickness Trigger - Activation of this input causes the unit to respond as if the final
thickness has been reached.
Input 4 Substrate thickness zero trigger – Activating this input (active true edge) causes the accumulated
thickness to be reset to zero.
Factory Installed I/O Program
with checksum ID=B41779
(if SWP key reversed locations, ID=X41779, where X is either memory section A or B)
The listing of the program to implement this is below in Table 5.5. (non-sequencing mode is addressed in
line 8) Each rung of the program is described following the program listing.
1:
I73 #2 = S8 (Cobra ship pgm 2003/5/22 CRC 41779)
2: I228 C8 (Xtal Fail Stop to Relay 1)
3: I79 #1 = O9
4: I81 #2 & O10
5: I221 S11
6: I228 C11
7: I0 T216
8: I0 T202
9: I1 T200
10: I2 T217
11: I3 T219
12: I68 O64
Table 5.5: Factory Installed I/O Program [in B memory].
Rung 001: This line along with rung 2 is used to control the crystal failure relay (Output 1, ID# 8). This
line examines the STOPPED status condition (I73) and compares it for a value of 2 (XBAD).
When the unit is aborted or stopped for a Xtal failure condition (related to sensor failure during
deposition), the relay is set (S8). It remains set until cleared in rung 2 (see below).
Rung 002: This line is used to reset or clear relay 1 (ID# 8). A detection of the Begin of Job/Film event
(I228) causes the clearing of the state of the resource #8 (Relay 1). Since this rung follows the
previous rung #1, even if the stopped condition (I73 equals 2) continued to persist, the clear
behavior would override the earlier set behavior, causing the relay to be cleared or reset. The
Begin Job/Film event is triggered or tripped at the start of every active film (leaving stop or idle
and entering the Begin/XtalVerify state). At this time the health of the sensors configured in the
Active Film/Active Map programming is re-evaluated. This is the point at which the earlier state
of a bad crystal is 'thrown out' and new condition ascertained. Of course, if the sensors are still
bad, the film will abort again, and the relay will close again due to rung #1 above.
Rung 003: This rung controls the Source shutter relay (Output 2, ID# 9). It does this by examining the state
of resource ID #79 (the Source Shutter bitmap value), which is the combined value of eight
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