INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual
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STC-2000A DEPOSITION CONTROLLER
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Initial Programming Setups (menu parameters)
system configuration programming (factory/ default settings, stand alone / computer controlled)
If the STC-2000A has: arrived directly from the factory or the factory settings key has been menu selected
or the purged settings key has been menu selected, the following specifies the parameter values in effect.
The following information will be repeated in later sections in greater detail along with additional related
information. The intent here is to introduce the reader to baseline values and consequently what must be
altered for the intended use. Purge values are listed first, followed by the factory differences.
Film Parameter values after purge:
Communication values after purge:
[non-SEQ adds "Final Thick Limit=0.0 KÅ"]
Material Density
1.00 gm/cc
COM/IO Lock Code
0
Material
Z-Factor
1.000
Keyboard
Beep
ON
Setpoint thick limit
0.000 KÅ
RS232 Baud Rate
9600
Setpoint time limit
0:00 MM:SS
RS232 Protocol
Sycon
Soak 1 Power Value
0.0%
Power Ramp 1 Time
0:00 MM:SS
System Configuration values after purge:
Power Soak 1 Time
0:00 MM:SS
Soak 2 Power Value
0.0%
LCD
Contrast
MEDIUM
Power Ramp 2 Time
0:00 MM:SS
Password Lock #
0
Power Soak 2 Time
0:00 MM:SS
Run Number
0
Soak 3 Power Value
0.0%
Recorder Functions
Off
Power Ramp 3 Time
0:00 MM:SS
Recorder Output Channel 1
(note conflict: Source Sensor Out is also1)
Deposit Rate
0.0 A/S
Clock Time
no change (HH/MM/SS)
Rate
Ramp
Mode
OFF
(w/o
battery:
00/01/00)
New Deposit Rate
0.0 A/S
Clock Date
no change (MM/DD/YY)
Rate
Ramp
Time
0:00
MM:SS
(w/o
battery:
01/01/01)
Rate Ramp Trigger
0.000 KÅ
I/O Slot x Type
Disabled
(where x = 1 to 4)
Control Loop P
100
Memory Module IFC
OFF
(used w/ installed
Control
Loop
I
1.0
secs
memory
module
option)
Control Loop D
1.0 secs
Max Power Limit
0.0%
RunTime Screen after PURGE:
Abort Max Power SW
ON
Max Power Dwell
0:30 MM:SS
PROCess
1
note1
Shutter
Delay
Mode
Off
Layer
#
note1
Shutter Delay Timeout
0:30 MM:SS
FILM (film in use)
1
Shutter Delay Quality
10
SRC
(Source Control Volts Channel)
1
Rate
Sampling
Off
XTAL
(blank)
Sample
Interval
0:30
MM:SS
MAP#
1
Sample Dwell Time
0:30 MM:SS
RUN time
0:00
Sample
Quality
10
PHASE
time
0:00
Sample Alarm Time
0:30 MM:SS
RUN#
0
Film Fail Mode
Time Power
(Graph parameter)
Rate Deviation
Control Loop Quality L
0
Crystal Quality
L/Q
(Sample/Hold = blank)
XTAL
Stability
S
0
XTAL Life Bounds
0.0%
MAIN MENU Screen after PURGE:
Plot Vert Scale Volts
100
Plot Horiz Scale H
1
Review Film
(film 1 will be reviewed)
Data Plot Type
RATE DEV
Review SS Map
(Map 1 will be reviewed)
SS
Map
Select
1
Next
Process
1
Select
0
Review
Processes
(Process 1 will be reviewed)
Etching Mode
Off (pos/neg)
note1: non-sequencing mode does not have this function (non-SEQ: ACTIVE FILM is 1).
SECTION 2.XX
page 44 of 292