INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual

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STC-2000A DEPOSITION CONTROLLER

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Choice: Next Process

NEXT ACTIVE PROCESS - This key choice allows the user to change the active process. There is

storage in the STC-2000A for 9 different processes. The box containing the text NEXT PROCESS
is a key used to indirectly input a new active process number. Pressing the NEXT PROCESS key
invokes the following display. Note on the main menu display above that the active process
number specified is 1. To select a different active process, press the NEXT PROCESS key. When
the numeric entry screen appears, enter the active process number needed by pressing the digit key
that represents the desired number and press ENTer to accept or BAcK to discard. The number last
entered immediately becomes the specified active process. At times during certain phases of
normal product use, the number digit will be temporarily replaced with the text NA (not
applicable) indicating that it would not be desirable to change the ACTIVE PROCESS at a time
when it is running. Also, NA appears when beginning with a memory purged unit. The active
process is the process that will begin with the next start. To change an active process, the STC-
2000A must be reset to the PROCESS STOP condition (Any error condition must be cleared and
no process can be running). See Sections 3.6-3.7 for full description. Thus to select a process, the
key text must indicate: NEXT PROCESS x, not UNIT BUSY NA.







Choice: Review Processes

REVIEW PROCESSES - This choice allows the product user to review and edit the process layer list

(recipe) of the selected process (1 through 9). Select the process number by pressing the REVIEW
PROCESSES key. The process that was last edited is shown in the menu path (top line).
associated digit key. Pressing the REVIEW PROCESSES key invokes the 1

st

of the following 2

displays. To select a process for edit/review, press the GO2 PRC key. When the numeric entry
screen appears, enter the number of the process to be edited/reviewed by pressing the digit key
that represents the desired number and press ENTer to accept or BAcK to discard. Note that the
process you are editing does not have to be the active process. The active process is indicated by
a "+" on the menu path line of the REVIEW PROCESS menu.

Process selection is not
possible with this indication,
use START key to reset.


Choice: Executive Menu

EXECUTIVE MENU - Changes how the STC-2000A is configured (communications, system

configuration and I/O setups) and allows access to Process Accounting screen and OPTions/INFo.
(See Section 3.19). A menu as shown in Figure 3.16 will appear. These are mainly system
operations that involve setups/configurations that are infrequently used. I/O setup is described in
Section 5, Communications Setup and computer interfacing in Section 6, Process Accounting in
Section 3.18, and System Configuration/Communications setup in Section 3.16. OPTions/INFo is
described in section 3.19.

SECTION 3.XX

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