INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 11)

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STC-2000A DEPOSITION CONTROLLER
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SECTION 1.XX e page 11 of 292 ^
GLOSSARY [9.XX]................................................................................................................................. 277
QUICK INDEX [10.XX] ......................................................................................................................... 279
Descriptions, etc. - (see prefatory table in section 1.2) ...................................................................... 279
INDEX ....................................................................................................................................................... 287
COPY PARAMETER LISTS.................................................................................................................. 290
FIGURES
Standard Sensors .................................................................................................................................. 21
Sequencing / Non-Sequencing Modes................................................................................................... 26
Process / Film / Map Relationships...................................................................................................... 27
Back Panel Connections (Overview) .................................................................................................... 32
Electrical Connections From Crystal Through Remote Oscillator (Overview) ................................... 34
Input Bd. Jumpers (Overview).............................................................................................................. 37
Installation/Removal Of Back Panel PCB Cards ................................................................................. 39
I/O Programming Notation .................................................................................................................. 48
I/O Programming Description.............................................................................................................. 48
I/O Programming: User Programmable Front Panel Keys/LEDs ....................................................... 49
Example I/O Programs......................................................................................................................... 49
I/O Programming: Modulo 100 Counter Addresses............................................................................. 51
Touch Panel Overlay ............................................................................................................................ 53
Front Panel and Key Descriptions ....................................................................................................... 54
Typical RunTime Screen....................................................................................................................... 55
Status Key Screens................................................................................................................................ 56
Manual Mode Screens .......................................................................................................................... 57
Status Screen Selector Function ........................................................................................................... 60
Start Key Menu ..................................................................................................................................... 60
Start (Key) Process Flowchart ............................................................................................................. 61
Menu Tree............................................................................................................................................. 63
RunTime Screen.................................................................................................................................... 64
Main Menu Screen................................................................................................................................ 66
Executive Menu .................................................................................................................................... 68
Films & Process Storage...................................................................................................................... 69
Review Film Menu ................................................................................................................................ 70
Non-Sequencing Mode Screen.............................................................................................................. 75
Rate Sampling, Sample And Hold Operation ....................................................................................... 80
Main Process Review/Edit Screen ........................................................................................................ 88
Service Menu, Memory Configurations ................................................................................................ 98
Setting the Active Process (Sequencing Mode)..................................................................................... 99
Setting The Active Film (Non-Sequencing Mode .................................................................................. 99
RunTime Screen (Non-Sequencing Mode).......................................................................................... 100
RunTime Screen: L/Q ......................................................................................................................... 102
RunTime Screen: Sample & Hold....................................................................................................... 102
Hand Controller/Pendent ................................................................................................................... 103
Manual Power Control....................................................................................................................... 105
Typical Run Cycle............................................................................................................................... 108
System Configuration Screens ............................................................................................................ 109
Communications Menu Screen ........................................................................................................... 112
Process Accounting Screens............................................................................................................... 119
Options Info Screens........................................................................................................................... 121
Memory Module.................................................................................................................................. 125