INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 194)

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STC-2000A DEPOSITION CONTROLLER
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I98 #2 / #1 & O301, Bit D1 of RTRSYNC shifted/masked to LSB SN301
I301 I300 & T235, When PocketGood signal TRUE and Source 2 syncing/ trig PG2
I12 O67, Copy state of relay 5 to LED D (rightmost)
I13 O66, Copy state of relay 6 to LED C (for MSB weight)
I104 #4 > I104 #1 < | O302, Test valid range of pocket source 2 as 1..4
I80 #18 = P O303, When enter INDEXER state generate event to SN303
I303 N I302 & T270, After delay of SN303/ if SN302 TRUE/invalid range/stop270
I301 O65, Map SN301 state when looking for pocket good to LED B (2nd)
Four softnodes are used: 300, 301, 302, 303.
.I/O Program Contents
Rung#
Expression Description
Film Hold
#12
P38 T86 Xtal Verify set film hold.
#13 P38 T145 Soft Node 145 used for 1 sec delay.
#14 ` N145 S146 Soft Node 146 to extend delayed verify.
event until end of Hold.
#15 P85 C146 When hold cleared remove 146.
#16 I146 17 * T85 Hold reset; When in layer after verify
and pocket good
Pocket Selection
Decoding
#17
I24 I26 I28 I30 + + + 0147 LSB
#18 I32 I147 + 0147 Films 1,3,5,7,9 have LSB on.
#19 I25 I26 I29 I30 + + + 0148 MBS on in films 2,3,6,7.
Pocket Selection
#20
P38 0149 Selection Strobe; Begin crystal verify.
#21 I149 I147 I12 ^ * * S12 Pocket selection relays.
#22 I149 I148 I13 ^ * * S13 Using outputs as cross coupled flip flops
#23 I149 I147 ^ I12 * * C12 prevents sending false position
#24 I149 I148 ^ I13 * * C13 information to the indexer.
SECTION 5.17 Layer number ID# 900-999
The current layer # is indicated by this ID#. ID 900 is true when the process is stopped ("#" sign
shown on display).These IDs can be only used as inputs to an I/O equation using the I, P, and N functions.
Example: The I/O rung 1: N904 T14 causes output relay 7 to close for 1 second after the end
of layer 4 in a process.
SECTION 5.18 Hand Controller Push Buttons / Front Panel LEDs and
Function Keys
The Hand Controller, see Figure 5.13, was designed to increase, decrease, or terminate the control
voltage to the deposition power source while in manual operation. When the STC-2000A is not in the
manual mode the three keys can be used for other functions. The keys INC, DEC, and STOP have been
assigned ID's which allow them to be incorporated into an I/O program.
SECTION 5.XX page 194 of 292