INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual
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STC-2000A DEPOSITION CONTROLLER
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state. The five value choices of 0,1, 2, 3 and 4 correspond to the following
meanings:
Value
Access
Description
0
PRGMOD_as is
leave memory state as is. The default state,
in effect, take no action.
1
PRGMOD_purged
everything set to forgotten default values.
safe. The unit will have no usefull program
content and will need programming by the
customer.
2
PRGMOD_factory
everything set to as if RS232 download,
same as purge above, except the I/O
program is left alone and certain film and
sys. configuration parameters are preloaded
to allow the customer to run simple film
operations as in instruction manual.
3
PRGMOD_clone
program STC-2000A from memory
module contents
4
PRGMOD_archive
save STC-2000A programming to memory
module
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Command: m
Mnemonic: EXCT_SSMAP_QRY
Parameters: either
<SSMAP#>,<SPARM#9..N> or <SSMAP#>,<CHNL#1..8>,<CPARM#1..N>
Description:
Command to query the multichannel Source/Sensor map parameters used to configure the
measurement process applied to a film. SSMAP# is an integer, 1..10, identifying which map is being
interrogated. The second parameter, when in the range of 1 or 2, indicates a sensor channel (crystal head)
configuration is targeted, with the third parameter CPARM# ranging from 1..N (see table of
SnsChnlAtrb_class SCA_xxx_G values below). The second parameter, when in the range of 9..N, will
associate with the sensor map SPID_OUTFS (FIRST_GENERIC_SENSOR_MAP_P) thru
LAST_GENERIC_SENSOR_MAP_P (SPID_SFAILM) value per the SPARM# table below.
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Table of Sensor Map non-channel related parameter SPARM#s for second parameter in range of 9..N
SPARM# Label
Description
9
OUTFS
Source output full scale volt. Is an enumeration value of CFSV_class
0
CFSV_2V
2.5 volts full scale.
1
CFSV_5V
5 volts F.S.
2
CFSV_10V
10 volts F.S.
10
SMAXP
Source output max power (additional) percentage.
0.0 to 100.0 percent.
11
SOCHL
Source output analog channel number 1 or 2
12
MTOOL
Master tooling 10.0-400.0%, like tooling.
SECTION 6.XX
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