INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 118)

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STC-2000A DEPOSITION CONTROLLER
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Averaging with Multiple Active Crystal Sensors and Averaging For Multi Layer Depositions
This adds another level of complexity to the serial multi sensor description above. Instead of a
single sensor being active, the map parameter CH x START MODE defines 2 channels as active, the MIN
START XTALS parameter reflects this same number (at least 2), the MIN ACTIVE XTALS =< MIN
START XTALS (BACKUP channels are optional). By selecting more than 1 active sensor channel,
averaging is automatically assumed. Multi layer would use, as previously described, separate film/map
combinations for each layer except in this case, more than 1 channel is active for each of the multiple
layers. The intent here is toward increased accuracy in a multiple layer material deposition.
The following parameters are described in greater detail in sections 3.5 and 3.15.
Related Film Parameters: FILM Fail Mode
TIME POWER, ABORT IF FAIL
Control Loop Qual Limits 0 to 9
XTAL Stability S (Limits) 0 to 9
XTAL Life Bounds 0.0-100.0%
Source Sensor MAP SELECT 1 - 10
Related Map Parameters: Master Tooling Value
10.0% - 400.0%
Minimum Start Xtal Channels 1 – 2 minimum channels
Minimum Backup Xtal Channels 0 – 1 minimum channels
Minumum Active Xtal Channels
1 – 2 minimum channels
Xtal Channel Drop Filter* NONE, BALANCE [dropped Xtal ch Failure]
Channel x Start Mode OFF, ACTIVE, STANDBY
Channel x Fail Action Mode NONE, ABORT FILM
Channel x Backup List X – XX (1 item list to 2 item list), [where X
= 1 to 2 (in each position w/o redundancies,
list extends to 0-2 for a 1 item list)]
Channel x Tooling Value 10.0% - 400.0%
Channel x Weight 10.0% - 400.0%
*averaging only
SECTION 3.XX page 118 of 292