INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 232)

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STC-2000A DEPOSITION CONTROLLER
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Parameter 19 Process Fail
Value Range 0,1,2
Units None
This parameter reports if a process has been terminated by other than normal completion. This is a read
only parameter.
0
Process Not Failed
1 Bad recipe, generally no layer programmed in process. Occur at process verify phase after a
process has been started.
2
Process error- sequence has been aborted due to some failure to complete film or external stop.
access: PRCFAIL PRCFAIL_class value of how process failed if was failed.
0 PRCFAIL_NOFAIL Not failed.
1 PRCFAIL_BADREC Bad recipe, invalid step #/recipe size.
2 PRCFAIL_ABORT Sequence aborted, film stopped.
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Parameter 20
Process/Layer State
Range 0....5
Units None
This parameter reports the phase or state of a layer of process. This is a read only parameter.
0
Process verify- checking to see if process is properly programmed. this occurs at the start of a
process and is of short duration.
1
Process stopped. Layer 0- this is the normal condition to start a process from its beginning.
2 Layer active, process resting- resetting a process error condition brings the unit to this state. At
this point by using different start functions, the unit can be made to restart the layer, start the next layer, or
reset to layer 0.
3
Process Busy- Process and layer are busy running a film.
4 Process Waiting- a wait has been encountered during the process sequence. A break wait start
command releases this condition.
5 Process
Error
access: LYRCD layer state code, LYRCD_class, vfy, stop, etc
0 LYRCD_vfy Verifying recipe.Short lived.
1 LYRCD_stop Process stopped, # displayed.
2 LYRCD_active Process resting.
3 LYRCD_busy Process Busy, running film.
4 LYRCD_waitchk Process Waiting.
5 LYRCD_error Error condition.
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Parameter 21
Reset To Zero Power
Value Range 0,1
Units None
This parameter reports if the source control voltage has been set to zero volts by either an I/O or external
command. Settable by computer (G21=0|1), or I/O Logic.
0
Not Set To Zero Volts.
1 Source control voltage has been set to zero volts.
access: JAMZPR Jam zero power, JAMZPR_class, off (0), on (1).
One per active source ident (1..8) LSB to MSB.
0 No sources overiden, source is at system power.
1 Source # 1 overiden to zero power.
2 Source # 2 overiden to zero power.
4 Source # 3 overiden to zero power.
8 Source # 4 overiden to zero power.
16 Source # 5 overiden to zero power.
32 Source # 6 overiden to zero power.
64 Source # 7 overiden to zero power.
128 Source # 8 overiden to zero power.
SECTION 6.XX page 232 of 292