INFICON HAPSITE ER Chemical Identification System - Manual (Page 456)

15 - 4
IP
N 07
4-
47
1-
P1
B
HAPSITE ER Operating Manual
15.3.4 Foreline Vent Valve
The Foreline Vent Valve is located in the middle of the MDP/Turbo Pump. This
valve vents the foreline to atmosphere through a small orifice. This valve is either
off, pulsed, or continuously open, depending on the situation.
The inside surfaces of the vacuum system will absorb water vapor when exposed
to the atmosphere. The amount absorbed is a function of the time exposed and
humidity. When the Service Module pumps are operated, this water vapor is
released and needs to be pumped out of the system. The roughing pump cannot
pump this water without aid of periodic venting of the foreline by the Foreline Vent
Valve. This is controlled automatically when the operation Attach HAPSITE or
Activate NEG is selected.
CAUTION
The system will not be ready for use until a MDP/Turbo
Pump speed of 1480 Hz is reached.
NOTE: Depending on the amount of water vapor present, reaching a pump speed
of 1480 Hz may take from five minutes for a dry system to several hours in
extreme cases.
The TMP indicator on the Service Module display will light up ACCL (accelerate)
when the MDP/Turbo Pump is accelerating and NORM (normal) when the
MDP/Turbo Pump has reached 1480 Hertz.
15.3.5 Roughing Pump
The Roughing Pump is a diaphragm pump. During normal operation, this pump will
evacuate the foreline to about 3 Torr. This pump is not designed to start when the
foreline is under vacuum. Over-temperature protection is provided to the pump
motor.
15.3.6 Vacuum Interconnect Valve Actuator
The Service Module contains an actuator for the Vacuum Interconnect Valve. Part
of the actuator mechanism operates inside the Service Module Manifold and
connects with the HAPSITE when the two are mated. This part of the actuator is
driven by a high torque motor through a rotary vacuum feed through.
15.3.7 Battery Charger
The Service Module contains a battery charger that will charge a HAPSITE battery
pack. The CHARGE indicator on the Service Module display will illuminate while
the battery is charging. This light will be extinguished when the charging
compartment is empty or the battery is fully charged.