INFICON HAPSITE ER Chemical Identification System User Manual

Page 505

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HAPSITE ER Operating Manual

11

Place the old NEG Pump into the protective container with the o-ring
assembly and place back in the box. See

Figure 16-30

.

Figure 16-30 Old NEG Pump

12

Perform an Attach function by selecting the Attach button from the Service
Window on the Service Module tab of the Properties section in the ER IQ
software. Refer to

section 15.7, Attaching the HAPSITE to the Service Module,

on page 15-12

.

13

Follow with

section 16.7.5, Part 4: Leak Check of the Vacuum System, on page

16-30

.

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