INFICON HAPSITE ER Chemical Identification System - Manual (Page 499)

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HAPSITE ER Operating Manual
5 Replace the VI valve into the bottom of manifold. Hand tighten.
See
Figure 16-20 .
Figure 16-20 Replacing the VI Valve
6 Clean the o-ring on the Service Module using Methanol. See Figure 16-21 .
Figure 16-21 Cleaning O-ring on the Service Module
7 Place the HAPSITE on the Service Module and lock down with the black side
latches. Refer to
section 2.6.2, Placing the HAPSITE on the Service Module,
on page 2-21 for additional instructions, if needed.
8 Continue with section 16.7.4, Part 3: Install the New NEG Pump, on page
16-24 .