INFICON HAPSITE ER Chemical Identification System - Manual (Page 495)

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HAPSITE ER Operating Manual
16.7.2 Part 1: NEG Pump Removal
1 This procedure requires the use of a Service Module. The HAPSITE should be
physically on the Service Module and attached. Refer to
section 2.6, Service
Module, on page 2-17 and Chapter 15, Service Module for more information on
setting up and using the Service Module.
2 If the NEG Pump is hot from recent use, let the system cool overnight before
performing this procedure. The NEG Pump should cool to below 60
o
C before
proceeding.
WARNING
Burn Hazard. Do not bypass the cool down step! If NEG
is not cool upon removal, the NEG will become extremely
hot and possibly cause sparks.
3 Vent the HAPSITE by choosing Vent HAPSITE on the Service window of the
Service Module tab in the Properties window (see
Figure 16-15 ). This starts an
automatic process which includes monitoring the cooling of the NEG Pump.
Figure 16-15 Vent HAPSITE from ER IQ Software