INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
RECORDER OUTPUT . . . . . . . . . . . 0 to 6
The recorder output number can be programmed for aggregate rate. There are
six outputs available which may be divided among source control voltage
outputs, individual sensor rate/thickness recorder outputs, aggregate
rate/thickness or power level recorder outputs. A value of zero indicates there
is not a recorder output chosen for that function. Values 1 through 6 refer to the
6 DAC outputs on the back of the instrument. The default value is zero. Refer
to
for DAC output selection rules.
RECORDER FUNCTION . . . . . . . . . 0 to 9
This parameter determines the function of the recorder output. Values range
from 0 to 8.
0 = Aggregate Rate in the range of 0 to 100 Å/s
1 = Aggregate Rate in the range of 0 to 1000 Å/s
2 = Aggregate Thickness in the range of 0 to 100 Å
3 = Aggregate Thickness in the range of 0 to 1000 Å
4 = Aggregate Rate Deviation on a scale of +/- 50 Å/s
5 = % Power
6 = Aggregate Rate in the range of 0 to 10 Å/s
7 = Aggregate Rate Deviation in the range of 0 to 50 Å/s
8 = Aggregate Thickness in the range of 0 to 5000 Å
9 = Aggregate Rate in the range of 0 to 1 Å/s