INFICON IC/5 Thin Film Deposition Controller - Manual (Page 126)

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IC/5 Operating Manual
3 The ON connector always takes precedence over the AND and OR operators
no matter where it appears in the statement. That is A AND B ON C will be
evaluated as A AND (B ON C) not (A AND B) ON C.
4 The only Events allowed following the ON connector are Layer ### and
Material ###.
6.3 ’IF’ Event Definitions
NOTE: If two layers are active simultaneously, an Event condition is considered
TRUE if it is true for one or both of the two layers (e.g. if the first layer is in
DEPOSIT and the second layer is in PRE-DEPOSIT, both the DEPOSIT
and the PRE-DEPOSIT Events would be TRUE).
NOTE: The presence (or absence) of an input is leading edge detected on the
transition from high to low (or low to high). Inputs are not “re-evaluated” if
held level at either the high or low state.
AUTO Z FAIL #
Sets the logic condition to be true whenever an Auto Z fail condition occurs for
the designated sensor. The condition remains true until the Auto Z Fail
condition is cleared.
AUTOTUNE
Sets the logic condition to be true when AutoTune is started. The condition
remains true until Autotune is completed, exited, or until an AutoTune Fail
condition occurs.
CHOPPER WHEEL
Sets the logic condition to be true at the end of the SOAK 2 state or MANUAL.
The condition remains true until the end of DEPOSIT or until a STOP command
is received.
COMPUTER CONTROL
Sets the logic condition to be true when a Set Logic Statement vvv command
is received from the remote communications port. The logic condition remains
true until a Clear Logic Statement vvv command is received from the remote
communications port. See Remote Commands RG5 and RG6 (see
section 7.7
on page 7-10 ).
COUNTER EXPIRED #
Indicates the counter number designated has been set and counted down to
zero.