INFICON IC/5 Thin Film Deposition Controller - Manual (Page 230)

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IC/5 Operating Manual
Figure 10-38 Statement 34
Statement 34 monitors for the same conditions as Statement 35 and turns off the 4
Relays associated with the electron beam gun filament voltage and electron beam
gun high voltage. Timer 13 is canceled at this point to signify the end of the
deposition process.
Figure 10-39 Statement 35
Timer 14 is set in Statement 35 to indicate a STOP command has been initiated
from the IC/5 front panel. The intention in using Timer 14 is to preserve the
STOP/START feature of the IC/5. In this manner the STOP button on the IC15 can
be used to “pause” the deposition cycle leaving the vacuum system under high
vacuum. The deposition process may be restarted at the point of interruption by
pressing START or may be restarted by pressing RESET then START in the normal
manner. (Timer 14 is used to indicate that a STOP has occurred after the process
was STARTed and before the process was completed).
Figure 10-40 Statement 36
This statement monitors the same condition as Statement 17 in the event that the
Vent Chamber input is activated while the deposition process is underway. The
“START PUMP CYCLE”, “UNDER HIGH VACUUM”, “PROCESS STARTED”, and
“COOL-DOWN CYCLE” messages are canceled and the IC/5 is placed in the
STOP state to prevent further process execution and ensure all source DAC
outputs are set to zero.
Figure 10-41 Statement 37
This statement monitors the Abort and Auto inputs. If the Abort input is activated or
the Auto input is not activated this statement takes down the messages associated
with the deposition process and cancels timers 10, 11, and 12. Where Timer 10 is
the delay between turning on the electron beam gun filament voltage and turning
on the electron beam gun high voltage. Timer 11 is the cool down period, and Timer
12 is the delay between closing the High Vacuum Valve and opening the Vent