INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
NON-DEPOSIT CLOCK HOLD (ON/OFF)
This feature “holds” the state timer during any non-deposit state. Non-deposit
states include the pre-deposit states: Ready, Source Switch, Rise 1, Soak 1,
Rise 2, Soak 2; and the post-deposit states: Feed Ramp, Feed Time, Idle Ramp
and Idle Time. For the feature to be activated the state’s time must be non zero.
The message NON-DEPOSIT HOLD is displayed in the lower right hand corner
of the CRT and is shown in reverse video.
If the instrument is in the READY or IDLE state and a START command is
executed while NON-DEPOSIT HOLD is active, the instrument will progress to
the first pre-deposit state with a non zero state time. If the instrument is in the
Source Switch state, waiting for the Turret Feedback Input, and
NON-DEPOSIT HOLD is activated, when the Turret Positioned input is
activated, the instrument will progress to the next pre-deposit state having a
non zero state time.
The instrument is prevented from continuing state processing until the action is
turned OFF.
RESET
This action is identical to pressing the RESET button on the front panel. (Refer
to
).
RW HOLD (ON/OFF)
When active (ON), this Action will place the Deposit state into the Hold portion
of the RateWatcher feature. The Sample portion of RateWatcher will not be
entered until the action is turned OFF. If Sample is already active, remains in
Sample until accuracy requirement is met.
RW HOLD INHIBIT (ON/OFF)
When active (ON) this will immediately cause the Deposit state to leave HOLD
and not return until turned OFF. If both RW HOLD and RW HOLD INHIBIT are
active, RW HOLD INHIBIT takes priority.
SELECT PROCESS #
This action selects which Process # is to be the Active Process; values range
from 1 to 50. The value entered must correspond to a defined Process. If the
instrument is already executing a Process, i.e. not in Ready or Idle of last layer
in process when this Action is activated, the Action is ignored.
START
This action is identical to pressing the START button on the front panel. (Refer
to
).
START INHIBIT (ON/OFF)
This feature, when active, prohibits the START of a process. Once ON, a
process cannot be started until the START INHIBIT is deactivated (OFF).