INFICON IC/5 Thin Film Deposition Controller - Manual (Page 106)

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IC/5 Operating Manual
CONTROL DELAY TIME . . . . . . . . . 00:00 to 99:59
This is the time interval for the instrument to be held in the Control Delay state.
The parameter is displayed only if the control option value chosen is a 2 or a 3.
The default value is 00:00.
Feed Ramp State
The next three parameters define a feed ramp provided to maintain power levels
during a wire feed. After reaching Final Thickness, the instrument will enter the
Feed Ramp state for the specified time. Control voltage is ramped from the power
level at the end of the DEPOSIT state to the Feed Power level. Feed Power is held
constant until the end of Feed Time. At the end of Feed Time, the instrument will
proceed to the Idle ramp state.
FEED POWER . . . . . . . . . . . . . . . . . 0.0 to 99.9%
This is one of three parameters used to affect a Feed Ramp. This value
establishes the control voltage power level at which the source is maintained
during wire feed. Values range from 0.0 to 99.9%. The default value is 0.
FEED RAMP TIME . . . . . . . . . . . . . 00:00 to 99:59 min:sec
This is the time interval for the source power to ramp linearly from the power
level at the end of Deposit to Feed Power. The Feed state is active during Feed
Ramp Time. Values range from 00:00 to 99:59 minutes:seconds. The default
value is 00:00.
FEED TIME . . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:sec
This is the time interval for which the source power is maintained at Feed
Power. The Feed state is active during Feed Time. Values range from 00:00 to
99:59 minutes:seconds. The default value is 00:00.
Idle Ramp State
The next two parameters define an idle ramp provided to maintain the control
voltage power level after the Deposit or Feed state. Control voltage is ramped from
the power level at the end of the Deposit state (or Feed Power, if one is set) to the
Idle Power level. The control voltage is maintained at the Idle Power level until the
instrument enters the STOP state or until the next layer, using the specified source,
is started, or the turret source is rotated.
IDLE POWER . . . . . . . . . . . . . . . . . 0.0 to 99.9%
This is one of two parameters used to affect an Idle Power Ramp. This value is
the power level at which the source is maintained after the DEPOSIT phase (or
after Feed phase if one is set up). Idle Power is usually the same as Soak
Power 1. Values range from 0.0 to 99.9%. The default value is 0%.