INFICON IC/5 Thin Film Deposition Controller - Manual (Page 279)

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IC/5 Operating Manual
13.2.3 Troubleshooting Transducers/Sensors
NOTE: Many sensor head problems may be diagnosed with a (Digital Volt Meter).
Disconnect the short oscillator cable from the feedthrough and measure
the resistance from the center pin to ground. If the reading is less than 1-2
megohms, the source of the leakage should be found and corrected.
Likewise, with the vacuum system open check for center conductor
continuity, a reading of more than 1 ohm from the feedthrough to the
transducer contact indicates a problem. Cleaning contacts or replacing the
in-vacuum cable may be required.
A somewhat more thorough diagnosis may be performed with the optional
Crystal Sensor Emulator, 760-601-G1. See
section 13.4 on page 13-28 for
a discussion of its use and diagnostic capabilities.
9 crystal fail message is
always on a. XIU/oscillator not
connected a. verify proper
sensor/oscillator
connections
b. XIU/oscillator
malfunctioning b. if available, insert a
known working
XIU/oscillator in place of
suspect one; if
XIU/oscillator is confirmed
bad, contact INFICON
service department
c. defective cable from
feedthrough to
XIU/oscillator or from
instrument to XIU/oscillator c. use an ohm meter or
DVIVI to check electrical
continuity or isolation as
appropriate
d. poor electrical contact in
the transducer,
feedthroughs, or in-vacuum
cable d. use an ohm meter or
DVIVI to check electrical
continuity or isolation as
appropriate
e. failed crystal/no crystal e. replace crystal/insert
crystal
f. two crystals placed into
the crystal holder f. remove one of the
crystals
g. frequency of crystal out of
range g. verify that the crystal
frequency is within the
required range, use
INFICON crystals.
Table 13-1 Troubleshooting the Instrument
SYMPTOM CAUSE REMEDY