INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
DEPOSIT
Sets the logic condition to be true at the beginning of the Deposit state or in the
Manual state. The condition remains true until the end of the DEPOSIT state,
when a STOP/RESET or STOP/START sequence is executed. Rate Ramps
are considered part of the Deposit state.
EXTERNAL INPUT ###
Designates a hardware input which, when it changes state, can be used to
trigger an Action. Inputs can be given names up to 10 characters long. See
. Inputs are activated by pulling the specific input’s
terminal to ground (<0.8 V) through a contact closure to common (GND) or with
TTL/CMOS logic having current sink capability of 2 mA (1 low power TTL load).
FEED RAMP TIME
Sets the logic condition to be true at the start of Feed Ramp. The condition
remains true until the end of Feed Ramp. The condition is also cleared when
entering the Manual state, when a STOP/RESET or a STOP/START sequence
is executed.
FEED TIME
Sets the logic condition to be true at the start of Feed Time. The condition
remains true until the end of Feed Time. The condition is also cleared when
entering the Manual state, when a STOP/RESET or a STOP/START sequence
is executed.
FINAL THICK
Sets the logic condition to be true once the Final Thickness is achieved while
in Deposit or Manual or when the Final Thickness Trigger action is activated.
The condition remains true until the Layer which has achieved Final Thickness
enters the IDLE state or until a STOP/RESET sequence is executed.
IDLE
Sets the logic condition to be true at the beginning of the Idle state. The
condition remains true until the end of Idle. The condition is also cleared when
entering the Manual state, when a STOP/RESET or a STOP/START sequence
is executed.
IDLE RAMP
Sets the logic condition to be true at the start of Idle Ramp. The condition
remains true until the end of Idle Ramp. The condition is also cleared when
entering the Manual state, when a STOP/RESET or a STOP/START sequence
is executed.