INFICON IC/5 Thin Film Deposition Controller - Manual (Page 158)

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IC/5 Operating Manual
7.7.3.4 Query Sensor Parameters
For each command format the symbol
þ
represents a blank space.
The format is:
QS
þ
param#
þ
sensor#
This command returns a sensor parameter or all sensor parameters.
7.7.3.5 Query Source Parameters
For each command format the symbol
þ
represents a blank space. The format is:
QC
þ
param#
þ
source#
This command returns a source control parameter or all source control parameters.
Table 7-9 Query Sensor Parameters
param# Sensor Parameter
0 Sensor Type
1 Xtal Switch Output
2 Xtal Shutter Output
3 Xtal Shutter Type
4 Z-Ratio Type
5 Recorder Output
6 Recorder Function
99 All Parameters; each separated by a space in the order
specified above.
Table 7-10 Query Source Parameters
param# Source Parameter
0 Voltage Range
1 Shutter Output
2 Shutter Output Type
3 Number of Crucibles
4 Crucible Output
5 Crucible Output Type
6 Turret Feedback
7 Turret Input
8 Turret Delay
9 DAC Output
99 All Parameters; each separated by a space in the order
specified above.