INFICON IC/5 Thin Film Deposition Controller - Manual (Page 189)

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IC/5 Operating Manual
Chapter 8
Source/Sensor Set-Up
8.1 Source/Sensor Set-Up Overview
The IC/5 provides the capability to configure the instrument’s source control and
measurement sensor channels. The basic unit has up to six source control
channels and two measurement sensors. Optionally, it will support up to eight
sensors. Each source control channel is treated as an individual device. The
sensors, however, are treated in pairs.
Figure 8-1 Display tree for Source/Sensor set-up
Source/Sensor Set-Up is initiated by selecting the Source/Sensor function (F4) in
the Program display. This will invoke the Source/Sensor Directory (see
Figure 8-1 ).
Upon entry, the cursor will be found at the last referenced source channel or sensor
pair. You may return to the Program display by selecting the F6 key (PROGRAM).
Figure 8-2 Source/Sensor Directory
PROGRAM
SOURCE/SENSOR DIRECTORY
SOURCE CHANNEL CONFIGURATION
SENSOR BOARD CONFIGURATION