4 sensor parameters – INFICON IC/5 Thin Film Deposition Controller User Manual
Page 194
8 - 6
IP
N 07
4-
23
7A
E
IC/5 Operating Manual
8.4 Sensor Parameters
The following entries represent the parameters possible with the standard two
sensors. Each sensor is configured separately. If the unit has optional sensors,
each additional pair of sensors will have an identical parameter set.
TYPE . . . . . . . . . . . . . . . . . . . . . . . . 1/2/6/7
This parameter provides selection among the single (1), dual (2), CrystalSix (6)
and Rotary (7) sensor heads. It enables the Crystal Switch feature for the
multi-position heads and enables the crystal indexing feature on the hand held
power controller. Allowable values are 1, 2, 6, and 7. The default value is 1. If
a value of 1 is entered the Xtal Switch Output parameter is removed from the
display. If a value of 2 is entered, then Sensor 2 Type is automatically set to a
value of 2. This parameter cannot be changed while executing a process.
XTAL SWITCH OUTPUT . . . . . . . . . 0 to 38
This parameter designates which of the 38 outputs is to be used as the Crystal
Switch relay for Sensor 1. Values range from 0 to 38. Values 1 through 38
correspond to the appropriate output. Value 0 indicates that the Crystal Switch
Output is not used. The default value is 0. A nonzero value must be entered if
a Sensor Type value of 2, 6, or 7 is chosen. If a value other than 0 is entered,
the relay chosen as the Crystal Switch relay is designated as such on the I/O
Map Display. The contact closure on this relay is always Normally Open.
If a dual head is chosen for Type, the output relay will close upon initiating a
Crystal Switch and then open upon initiating a second Crystal Switch. If
CrystalSix is chosen for the Type, then upon initiating a Crystal Switch, the
output relay will first close for one second, then open for one second, then close
for one second and then open (i.e., two pulses to move one position). If a
“rotary” sensor is chosen for the Type (Type 7), then upon initiating a crystal
switch, the output relay will first close for one second and then open (i.e., one
pulse to move one position). When Type 7 is chosen the XTAL position
selection feature (
) is not available. The Type 7
sensor head is assumed to have six crystal positions. Refer to
for additional information.