INFICON IC/5 Thin Film Deposition Controller - Manual (Page 202)

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IC/5 Operating Manual
ANALOG DISPLAY . . . . . . . . . . . . . 0/1/2
This determines the vertical scale for the graphics display when in the
OPERATE display. Permissible values are 0, 1, and 2. A zero sets the vertical
scale to ± 10 Å/s, a 1 sets the vertical scale to ± 20 Å/s, and a 2 sets the scale
to % Power. The default value is 0.
ANALOG SCAN RATE . . . . . . . . . . 0/1/2/3
This determines the horizontal axis for the graphics area when in the
OPERATE display. Permissible values are 0, 1, 2 and 3. A zero places the scan
rate into Auto mode. A 3 sets the scale to 3 measurements per horizontal pixel,
a 2 sets the scale to 10 measurements per horizontal pixel, and a 1 sets the
scale to 40 measurements per horizontal pixel. The default value is 0. When in
the Auto mode, the scan rate starts in “fast”; after reaching the end of the
display the graph collapses to half size and continues in “medium”; again at the
end of the display the graph will collapse to half size and continue in “slow”.
TEST ON . . . . . . . . . . . . . . . . . . . . . YES/NO
This feature provides a constant rate signal which can be varied by altering the
density and tooling parameters (see Section 3.6.7). It is designed to allow
testing of a Process without actually running a deposition. YES turns the test
signal on. The default value is NO. This parameter cannot be changed while
executing a process.
TIME COMPRESSED . . . . . . . . . . . YES/NO
When in TEST mode, this feature allows a faster than real time execution of the
Process. This is useful when testing a long Process. A value of YES increases
the speed of execution 10 to 1. The default value is NO.
PROGRAM LOCK CODE . . . . . . . . 1 to 9999, 0
The Program Lock Code restricts access to programming and modifying the
instrument. All parameters, including the SENSOR parameters and Logic
Statements, can be reviewed but none can be changed unless the correct lock
code is entered. Values range from 1 to 9999.
Before entering a new lock code, the current code must be entered.
Entering a value of zero erases the lock code and provides open access. The
default condition is unlocked or open access. If a nonzero lock code is
programmed, the lock code can be reset to the unlocked condition by pressing
the Clear key while powering up the instrument.