4 update sensor parameters, 5 update source parameters – INFICON IC/5 Thin Film Deposition Controller User Manual
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IC/5 Operating Manual
7.7.4.4 Update Sensor Parameters
For each command format the symbol
þ
represents a blank space.
The format is:
US
þ
param#
þ
sensor#
þ
value
This command changes the value of a sensor parameter. See
, for parameter value ranges.
7.7.4.5 Update Source Parameters
For each command format the symbol
þ
represents a blank space.
The format is:
UC
þ
param#
þ
source#
þ
value
This command changes the value of a source control parameter. See
for parameter value ranges.
Table 7-15 Update Sensor Parameters
param# Sensor
Parameter
0
Type
1
Xtal Switch Output
2
Xtal Shutter Output
3
Xtal Shutter Type
4
Z-Ratio Type
5
Recorder Output
6
Recorder Function
Table 7-16 Update Source Parameters
param# Source
Parameter
0
Voltage Range
1
Shutter Output
2
Shutter Output Type
3
Number of Crucibles
4
Crucible Output
5
Crucible Output Type
6
Turret Feedback Value is upper or lower case YES or NO
7
Turret Input
8
Turret Delay
9
DAC Output