INFICON IC/5 Thin Film Deposition Controller - Manual (Page 235)

11 - 3
IP
N 07
4-
23
7A
E
IC/5 Operating Manual
11.1.2 Sensor Installation
Figure 11-1 shows a typical installation of an INFICON water cooled crystal sensor
in the vacuum process chamber. Use the illustration and the following guidelines to
install your sensors for optimum performance and convenience.
Figure 11-1 Typical Installation
Mounting Bracket
Coax Cable
(Routed with
Water Tubes)
Or,
Customer Supplied
Cajon Coupling
Brazing
Adapters
Water In
Water Out
XIU (Oscillator)
Instrument Chassis
Source
Source
Shutter
Pneumatic
Actuator
To
Source Controller
Source to Sensor
10" Minimum
Sensor
Shutter
Air, 80 PSI, 110 PSI Max.
To
Sensor
Shutter
IPN 750-420-G1
Shutter
Solenoid
Assembly