INFICON IC/5 Thin Film Deposition Controller - Manual (Page 93)

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IC/5 Operating Manual
DATE: MMDDYYYY
TIME: XX:XX
PROCESS #1: ##
RUN #: ###
LAYER #: ###
MATERIAL NAME: NNN#MM#
PROCESS TIME XX:XX
LAYER TIME: XX:XX
DEPOSITION TIME: XX:XX
THICKNESS: ###.### kÅ
AVE. AGG. RATE: ###.### Å/s
AVE. RATE DEVIATION: ##.# Å/s
ENDING POWER: ##.# %
AVE. POWER: ##.# %
COMPLETION MODE:normal, time-power...ave. value,
crystal fail, remote, keyboard, max.
power, hand-held controller.
Crystal Use History (example)
SENSOR 1
BEG. END BEG. END BEG. END
XTAL FREQ. FREQ. LIFE LIFE ACT. ACT. STAB. QUAL.
1 5975323 5876991 0% 2% 245 240 30 22
2 5978368 5879012 0% 2% 225 189 1200 99
3 5768733 5677987 3% 5% 176 168 0 0
4 5346278 5129870 48% 51% 150 105 0 0
5 4876789 4567899 78% 81% 101 101 25 1
6 4678843 4500000 98% 100% 100 92 0 0
SENSOR 2
BEG. END BEG. END BEG. END
XTAL FREQ. FREQ. LIFE LIFE ACT. ACT. STAB. QUAL.
2 5978368 5879012 0% 2% 225 189 1200 99
3 5768733 5677987 3% 5% 176 168 0 0
5 4876789 4567899 78% 81% 101 101 25 1
SENSOR 8
BEG. END BEG. END BEG. END
XTAL FREQ. FREQ. LIFE LIFE ACT. ACT. STAB. QUAL.
1 5975323 5876991 0% 2% 245 240 30 22
NOTE: A minus sign in front of the END FREQ. value indicates that crystal has
failed.