INFICON IC/5 Thin Film Deposition Controller - Manual (Page 108)

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IC/5 Operating Manual
WEIGHT. . . . . . . . . . . . . . . . . . . . . . 1.0 to 400.0%
The Sensor Weight parameter is used to gauge the relative importance of each
sensor's measured rate in calculating a weighted average “aggregate” rate.
The default value is 100%.
If the WEIGHT parameter for a sensor is changed, the new WEIGHT for this
sensor will be used for subsequent calculations of the aggregate rate, if the
sensor’s OPTION is non-zero.
NOTE: This parameter affects the aggregate rate calculation. The aggregate
thickness accumulated thus far is not re-scaled based on the change
to the weighting factor.
TOOLING . . . . . . . . . . . . . . . . . . . . . 10.0 to 400.0%
The Sensor Tooling factor is used to account for the geometric tooling factor of
each sensor. The default value is 100%.
If the TOOLING parameter for a sensor is changed, the new TOOLING value
is used for subsequent calculations of the sensor rate, and therefore the
aggregate rate, if the sensor’s OPTION is non-zero.
NOTE: This parameter affects the aggregate rate calculation. The aggregate
thickness accumulated thus far is not re-scaled based on the change
to the TOOLING of a sensor. The individual sensor’s accumulated
thickness is also not re-scaled.
For installations using only a single sensor, use a value of 100% here, and
adjust the MASTER TOOLING factor to match the thickness measured by the
IC/5 to the thickness measured at the substrate. For multiple sensor
applications, use the sensor tooling factors to adjust each sensor until they all
read the same deposition rate, then use the MASTER TOOLING factor as
described above.
CAL THICK
Calibration Thickness values are only used in co-deposition applications and
do not pertain to single layer sequential deposition. These thickness values are
used to compensate for the cross talk (or interference) from each source onto
sensors used to control the other source’s flux. The values range from 0.000 to
999.8 kÅ or UNCAL. UNCAL indicates the sensor has not been calibrated.
Values may be entered by the user or may be entered automatically using the
cross talk calibration feature of the IC/5. See
section 12.5 on page 12-4 for a
discussion of cross talk calibration.
XL POSITION . . . . . . . . . . . . . . . . . 0 to 6
When using a CrystalSix sensor head, this allows selection of which of the six
crystals are to be used. This incorporates automatic crystal switching (upon a
crystal fail) to a predetermined subset of the 6 crystal positions if desired. A
value of 0 enables sequential positioning.